JPH0410952U - - Google Patents

Info

Publication number
JPH0410952U
JPH0410952U JP5010290U JP5010290U JPH0410952U JP H0410952 U JPH0410952 U JP H0410952U JP 5010290 U JP5010290 U JP 5010290U JP 5010290 U JP5010290 U JP 5010290U JP H0410952 U JPH0410952 U JP H0410952U
Authority
JP
Japan
Prior art keywords
wafer
belt
support base
inclined portion
holding mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5010290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5010290U priority Critical patent/JPH0410952U/ja
Publication of JPH0410952U publication Critical patent/JPH0410952U/ja
Pending legal-status Critical Current

Links

JP5010290U 1990-05-14 1990-05-14 Pending JPH0410952U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5010290U JPH0410952U (US07923587-20110412-C00022.png) 1990-05-14 1990-05-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5010290U JPH0410952U (US07923587-20110412-C00022.png) 1990-05-14 1990-05-14

Publications (1)

Publication Number Publication Date
JPH0410952U true JPH0410952U (US07923587-20110412-C00022.png) 1992-01-29

Family

ID=31568364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5010290U Pending JPH0410952U (US07923587-20110412-C00022.png) 1990-05-14 1990-05-14

Country Status (1)

Country Link
JP (1) JPH0410952U (US07923587-20110412-C00022.png)

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