JPH0410401Y2 - - Google Patents
Info
- Publication number
- JPH0410401Y2 JPH0410401Y2 JP3482285U JP3482285U JPH0410401Y2 JP H0410401 Y2 JPH0410401 Y2 JP H0410401Y2 JP 3482285 U JP3482285 U JP 3482285U JP 3482285 U JP3482285 U JP 3482285U JP H0410401 Y2 JPH0410401 Y2 JP H0410401Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- processing container
- exhaust pipe
- vacuum processing
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3482285U JPH0410401Y2 (US20030204162A1-20031030-M00001.png) | 1985-03-12 | 1985-03-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3482285U JPH0410401Y2 (US20030204162A1-20031030-M00001.png) | 1985-03-12 | 1985-03-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61150501U JPS61150501U (US20030204162A1-20031030-M00001.png) | 1986-09-17 |
JPH0410401Y2 true JPH0410401Y2 (US20030204162A1-20031030-M00001.png) | 1992-03-16 |
Family
ID=30538551
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3482285U Expired JPH0410401Y2 (US20030204162A1-20031030-M00001.png) | 1985-03-12 | 1985-03-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0410401Y2 (US20030204162A1-20031030-M00001.png) |
-
1985
- 1985-03-12 JP JP3482285U patent/JPH0410401Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS61150501U (US20030204162A1-20031030-M00001.png) | 1986-09-17 |
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