JPH04102089A - X-rays image sensor - Google Patents
X-rays image sensorInfo
- Publication number
- JPH04102089A JPH04102089A JP21978190A JP21978190A JPH04102089A JP H04102089 A JPH04102089 A JP H04102089A JP 21978190 A JP21978190 A JP 21978190A JP 21978190 A JP21978190 A JP 21978190A JP H04102089 A JPH04102089 A JP H04102089A
- Authority
- JP
- Japan
- Prior art keywords
- fluorescent film
- image sensor
- fluorescent
- fiber
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000835 fiber Substances 0.000 claims abstract description 21
- 230000003287 optical effect Effects 0.000 abstract description 7
- 239000000057 synthetic resin Substances 0.000 abstract description 4
- 229920003002 synthetic resin Polymers 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract description 2
- 239000011701 zinc Substances 0.000 abstract description 2
- 229910052725 zinc Inorganic materials 0.000 abstract description 2
- 239000000049 pigment Substances 0.000 abstract 2
- 239000007787 solid Substances 0.000 abstract 2
- 239000002253 acid Substances 0.000 abstract 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 14
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 8
- 238000004040 coloring Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000011651 chromium Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 231100000987 absorbed dose Toxicity 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910001430 chromium ion Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- PBYZMCDFOULPGH-UHFFFAOYSA-N tungstate Chemical compound [O-][W]([O-])(=O)=O PBYZMCDFOULPGH-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measurement Of Radiation (AREA)
- Radiography Using Non-Light Waves (AREA)
- Light Guides In General And Applications Therefor (AREA)
- Conversion Of X-Rays Into Visible Images (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、産業用、医療用等に使われているＸ線イメー
ジセンサ−に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an X-ray image sensor used for industrial, medical, etc. purposes.
本発明は、固体撮像素子上に、ファイバー部材を設け、
そのファイバー部材上に蛍光膜を形成させたＸ線イメー
ジセンサ−において、蛍光膜の材料としてタングステン
酸亜鉛にクロムイオンをドープした蛍光体を用いること
により、ファイバー部材の光学系Ｘ線着色損傷の影響を
防いだものである。The present invention provides a fiber member on a solid-state image sensor,
In the X-ray image sensor in which a fluorescent film is formed on the fiber member, by using a phosphor made of zinc tungstate doped with chromium ions as the material for the fluorescent film, the optical system of the fiber member is affected by X-ray coloring damage. This prevents
従来、Ｘ線イメージセンサ−は、固体撮像素子上にファ
イバー部材を設け、その上に可視領域で発光する硫化亜
鉛等の蛍光膜を形成したものであった。Conventionally, an X-ray image sensor has a fiber member provided on a solid-state imaging device, and a fluorescent film made of zinc sulfide or the like that emits light in the visible region formed thereon.
上記のような蛍光膜では、可視領域で発光するため、第
２図の斜線部に示すようにＸ線着色損傷をおこし、光学
的性質がかなり劣化するという欠点を有しており、この
解決にｙＡ題があった。Since the fluorescent film described above emits light in the visible region, it has the disadvantage of causing X-ray coloring damage as shown in the shaded area in Figure 2, and considerably deteriorating its optical properties. There was a yA title.
上記課題点を解決するために、本発明においては、固体
撮像素子とファイバー部材と蛍光膜２とからなるｘＨイ
メージセンサ−で、蛍光体をＺｎＷＯａ：Ｃｒとするこ
とにより、ファイバー部材のＸ線着色損傷の影響を防ぐ
ものとした。ここで、固体撮像素子はＣＣＤ、 フォト
ダイオード等のいかなる固体撮像素子でもよい。また、
ファイバー部材として、ファイバープレーロ イメージ
バンドル等がある。In order to solve the above problems, in the present invention, in an xH image sensor consisting of a solid-state image sensor, a fiber member, and a fluorescent film 2, by using ZnWOa:Cr as the phosphor, the fiber member is colored by X-rays. It was designed to prevent the effects of damage. Here, the solid-state image sensor may be any solid-state image sensor such as a CCD or a photodiode. Also,
Fiber materials include Fiber Plero Image Bundle.
上記のような構成によれば、用いられる蛍光膜が９００
ｎｍから１］００ｎｍの発光を有するものであるため、
低波長の蛍光がないため、蛍光膜を透過したＸ線による
ファイバー部材の着色損傷の影響を防ぐことができる。According to the above configuration, the number of fluorescent films used is 900.
Since it emits light from nm to 1]00 nm,
Since there is no low-wavelength fluorescence, it is possible to prevent color damage to the fiber member caused by X-rays transmitted through the fluorescent film.
つまり、低波長の発光がないため、ファイバー部材に着
色損傷を与えない。In other words, since there is no low wavelength light emission, no coloring damage is caused to the fiber member.
以下に、本発明の実施例を図面に基づいて説明する。 Embodiments of the present invention will be described below based on the drawings.
〔第１実施例〕
第１実施例は、蛍光体としてＺｎＷＯ４：Ｃｒを用いた
Ｘ線イメージセンサ−の場合である。[First Example] The first example is an X-ray image sensor using ZnWO4:Cr as a phosphor.
第１図は、本発明のＸ線イメージセンサ−の実施例を示
す断面図である。この図を用いて構成を説明する。構成
は固体撮像素子の画像入力面４上にファイバープレート
２が光学接着剤３を使って密着している。更に前記ファ
イバープレート２上に蛍光膜１を形成した構成であり、
一体化したＸ線イメージセンサ−を作成した。FIG. 1 is a sectional view showing an embodiment of the X-ray image sensor of the present invention. The configuration will be explained using this figure. The structure is such that a fiber plate 2 is tightly attached to an image input surface 4 of a solid-state image sensor using an optical adhesive 3. Further, a fluorescent film 1 is formed on the fiber plate 2,
An integrated X-ray image sensor was created.
蛍光膜ｌは、材料と合成樹脂を混合したものを、ファイ
バープレート２上に１０〜５０ミクロンの厚さに均一に
塗布した。For the fluorescent film 1, a mixture of material and synthetic resin was uniformly applied onto the fiber plate 2 to a thickness of 10 to 50 microns.
この蛍光膜１を用いたＸ線イメージセンサ−においてｌ
Ｏ’Ｒ／ｈで１０ｈ、Ｘ線照射後の出力強度は、従来の
可視光領域の蛍光体を用いたＸ線イメージセンサ−の出
力強度を１００とした場合７００であった。In an X-ray image sensor using this fluorescent film 1,
The output intensity after X-ray irradiation was 700 when the output intensity of a conventional X-ray image sensor using a phosphor in the visible light region was 100.
〔第２実施例〕
第２実施例は、本発明のＸ線イメージセンサ−の他の実
施例を第３図に基づいて説明する。[Second Embodiment] In the second embodiment, another embodiment of the X-ray image sensor of the present invention will be explained based on FIG. 3.
構成は、第１実施例とほぼ同様であるが、第１実施例で
は、ファイバー部材としてファイバープレート２を用い
たが、第３実施例ではイメージバンドル８を用いた。The configuration is almost the same as that of the first embodiment, but in the first embodiment, the fiber plate 2 was used as the fiber member, whereas in the third embodiment, the image bundle 8 was used.
蛍光膜として、蛍光体ＺｎＷＯ４：Ｃｒと合成樹脂を混
合しイメージバンドル８上に１０〜５０ミクロンの厚さ
に塗布したものを用いた。The fluorescent film used was a mixture of phosphor ZnWO4:Cr and synthetic resin and coated on the image bundle 8 to a thickness of 10 to 50 microns.
この蛍光膜１を用いたＸ線イメージセンサ−において１
０’Ｒ／ｈでＩＯｈ、Ｘ線照射後の出力強度は、従来の
可視領域の蛍光体を用いたＸ線イメージセンサ−の出力
強度を１００とした場合、７００であった。In an X-ray image sensor using this fluorescent film 1, 1
IOh at 0'R/h, the output intensity after X-ray irradiation was 700, when the output intensity of a conventional X-ray image sensor using a visible region phosphor is 100.
実施例では、蛍光膜のファイバー部材上への形成方法と
して、合成樹脂を用いて塗布する方法を挙げたが、この
他、蒸着法、スパッタ法、ＣＶＤ法などの薄膜形成法を
用いて形成することも可能である。In the examples, as a method for forming a fluorescent film on a fiber member, a method of coating using a synthetic resin was mentioned, but in addition, thin film forming methods such as a vapor deposition method, a sputtering method, and a CVD method may be used. It is also possible.
本発明によれば、発光域が９００ｎｒｒ＋−１１０Ｑｎ
ｍである蛍光体を用いることにより、光学系のＸ線着色
損傷の影響がなくなり、従来の可視領域の蛍光体を用い
た場合、１０４レントゲンであった吸収線量が１０＠レ
ントゲンと１万倍寿命が長くなるＸ線イメージセンサ−
の達成を可能にした。According to the present invention, the emission range is 900nrr+-110Qn
By using a phosphor that is rated at m, the influence of X-ray coloring damage to the optical system is eliminated, and when using a conventional visible region phosphor, the absorbed dose is 10@Roentgen, which is 10@Roentgen, which is 10,000 times longer. X-ray image sensor with longer
made it possible to achieve
第１図は、本発明の実施例を示す断面図、第２図は、フ
ァイバーにおける波長と透過率の変化を示ず閲５第３図
は、本発明のＸ線イメージセンサ−の他の実施例を示す
断面図である。FIG. 1 is a cross-sectional view showing an embodiment of the present invention, and FIG. 2 is a cross-sectional view showing changes in wavelength and transmittance in the fiber. It is a sectional view showing an example.
１・・・蛍光膜 ２・・・ファイバープレート ３・・・光学接着剤 ４・・・固体撮像素子 ５・・・リードフレーム ６・・・基板 ７・・・Ｘ線照射による劣化部 ８・・・イメージバンドル 以上 出願人 セイコー電子工業株式会社 代理人 弁理士 林 敬 之 助1... Fluorescent film 2...Fiber plate 3...Optical adhesive 4...Solid-state image sensor 5...Lead frame 6... Board 7... Degraded part due to X-ray irradiation 8...Image bundle that's all Applicant: Seiko Electronics Industries Co., Ltd. Agent: Patent Attorney Takayoshi Hayashi
Claims (1)
ｎＷＯ＿４：Ｃｒの蛍光膜を形成させたことを特徴とす
るＸ線イメージセンサー。A fiber member is provided on the solid-state image sensor, and a Z
nWO_4: An X-ray image sensor characterized by forming a fluorescent film of Cr.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21978190A JPH04102089A (en) | 1990-08-21 | 1990-08-21 | X-rays image sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21978190A JPH04102089A (en) | 1990-08-21 | 1990-08-21 | X-rays image sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04102089A true JPH04102089A (en) | 1992-04-03 |
Family
ID=16740907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21978190A Pending JPH04102089A (en) | 1990-08-21 | 1990-08-21 | X-rays image sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04102089A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7821877B2 (en) | 2005-02-22 | 2010-10-26 | Citizen Holdings Co., Ltd. | Pointer indication type timepiece |
-
1990
- 1990-08-21 JP JP21978190A patent/JPH04102089A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7821877B2 (en) | 2005-02-22 | 2010-10-26 | Citizen Holdings Co., Ltd. | Pointer indication type timepiece |
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