JPH04102073A - Transporting mechanism of measuring equipment and the like in electric wave dark room - Google Patents

Transporting mechanism of measuring equipment and the like in electric wave dark room

Info

Publication number
JPH04102073A
JPH04102073A JP22041590A JP22041590A JPH04102073A JP H04102073 A JPH04102073 A JP H04102073A JP 22041590 A JP22041590 A JP 22041590A JP 22041590 A JP22041590 A JP 22041590A JP H04102073 A JPH04102073 A JP H04102073A
Authority
JP
Japan
Prior art keywords
slit
anechoic chamber
ceiling
door
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22041590A
Other languages
Japanese (ja)
Inventor
Toshiyuki Taira
敏幸 平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Communication Equipment Co Ltd
Original Assignee
Toyo Communication Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Communication Equipment Co Ltd filed Critical Toyo Communication Equipment Co Ltd
Priority to JP22041590A priority Critical patent/JPH04102073A/en
Publication of JPH04102073A publication Critical patent/JPH04102073A/en
Pending legal-status Critical Current

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  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)

Abstract

PURPOSE:To eliminate shielding of a large-area opening for carrying in and out by supporting a suspension device along a slit which is formed on a ceiling of a connected electric wave dark room main body and that of a room for storing measuring equipment so that the suspension device can be moved and by providing a door for carrying in and out on a boundary wall. CONSTITUTION:A storage room 6 of a measuring equipment is connected to the outside of a one-side wall 3 of an electric wave dark room main body 1 where electric wave absorbing bodies 5 are applied to a ceiling 2, a side wall 3, and a floor 4 and a door 7 is provided on the boundary wall 3. The door 7 has a sufficient area for enabling the absorbing bodies 5 to be provided on an inner wall at a side of the main body 1 and a pedestal 11 etc. to be suspended and passed at a height exceeding the absorbing body 5 of the floor 4. A slit 12 is formed on both ceilings of the main body 1 and the storage room 6. A cable 13 and a hook 14 which are connected to a hoist 15 goes downward through the slit 12 and is suspended at the pedestal 11. Therefore, when the pedestal 11 with an equipment 10 etc., is move between the main body 1 and the storage room 6, the door 7 may be opened, the pedestal 11 is lifted by the hook 14, and the hoist 15 may be moved. The door 7 and the slit 12 do not require shielding owing to the absorbing body 5.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は電波暗室の改良に関し、詳しくは電波暗室内で
の実験に供する測定機器、測定対象物等々の必要備品を
利用目的に応じて搬出入することができる電波暗室にお
ける測定機器等の移送機構に関する。
[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to the improvement of an anechoic chamber, and more specifically, the transport of necessary equipment such as measuring instruments and objects to be measured for experiments in the anechoic chamber according to the purpose of use. The present invention relates to a mechanism for transporting measurement equipment, etc., into an anechoic chamber.

(従来の技術) 電波暗室或は電波無響室と呼ばれる施設は、内壁に電波
吸収体を貼り巡らせた部屋であり、この部屋内で各種の
実験を行なう場合には天候、外来電波、建物等の障害物
の影響を受けることがなく、しかも電波が壁面で吸収さ
れて反射波を生じないことから、アンテナの指向性実験
や、電子機器等が放射する電磁波雑音の評価試験に用い
られる。
(Prior Art) A facility called a radio anechoic chamber or a radio anechoic chamber is a room whose inner walls are lined with radio wave absorbers, and when conducting various experiments in this room, it is necessary to conduct various experiments in this room due to weather, external radio waves, buildings, etc. It is used for antenna directivity experiments and evaluation tests of electromagnetic noise emitted by electronic devices because it is not affected by obstacles and the radio waves are absorbed by walls and does not produce reflected waves.

ところで、電波暗室を用いた実験において測定機器や、
測定対象たるアンテナや電子機器を別のものと入替える
場合には、先ず電波暗室の天井、側壁等の電波吸収体ブ
ロックを一旦取外して大面積の開口を形成した後、床面
に敷詰めた電波吸収体の一部を除去し、然る後前記開口
からクレーン等を暗室内に差入れて測定機器等の入替え
作業を行なうと共にその入替え完了後は再び当該電波吸
収体ブロックを元の位置に戻す必要があった。
By the way, in an experiment using an anechoic chamber, measuring equipment and
When replacing the antenna or electronic device to be measured with another one, first remove the radio wave absorber blocks from the ceiling, side walls, etc. of the anechoic chamber to form a large-area opening, and then spread it on the floor. A part of the radio wave absorber is removed, and then a crane or the like is inserted into the darkroom through the opening to replace the measuring equipment, etc., and once the replacement is complete, the radio wave absorber block is returned to its original position. There was a need.

しかしながら、大型クレーン等を用いた搬出入作業を要
する従来の電波暗室は、搬出入時における作業性が悪い
ばかりか、前記大面積の開口を完全にシールドする為に
は複雑な機構を必然とする故かなりのコストを要し、こ
のコストはほぼ開口面積に比例するものであった。
However, conventional anechoic chambers that require loading and unloading using large cranes, etc. not only have poor workability when loading and unloading, but also require complicated mechanisms to completely shield the large opening. Therefore, a considerable amount of cost was required, and this cost was approximately proportional to the opening area.

このようなところから、側壁に設けた搬出入口と床面上
の機器接地箇所との間を結ぶ線上にレールを敷設し、当
該線上に位置する複数の吸収体ブロックを該レールに沿
って該搬出入口から出入れすることにより、機器の搬出
入作業を容易化したものが提案されている(特公昭63
−64080号公報)。
From this point, a rail is laid on a line connecting the loading/unloading entrance provided on the side wall and the equipment grounding point on the floor, and the multiple absorber blocks located on the line are unloaded along the rail. A device has been proposed that facilitates the loading and unloading of equipment by allowing loading and unloading from the entrance (Special Publications Publication No. 63).
-64080).

また、実公昭58−12479号公報には、電波暗室の
床面の下方に機器搬出入路を設け、床面の機器接地箇所
に設けた開口からエレベータ式に機器を出入れする構成
が開示されている。
Furthermore, Japanese Utility Model Publication No. 58-12479 discloses a configuration in which an equipment loading and unloading path is provided below the floor of the anechoic chamber, and equipment is loaded and unloaded in an elevator style through an opening provided at the equipment grounding point on the floor. ing.

しかしながら、上記公報記載のいずれの電波暗室にあっ
ても側壁に形成した搬出入用開口を測定機器等の出し入
れに十分な面積を有したものとする必要があるため、当
該開口を閉止する際のシールドが容易でなく、シールド
のための機構の複雑化に伴うコストアップを回避するこ
とができなかった。
However, in any of the anechoic chambers described in the above publications, the opening formed in the side wall for loading and unloading must have a sufficient area for loading and unloading measuring instruments, etc., so when closing the opening, Shielding is not easy, and it has been impossible to avoid increased costs due to the complexity of the shielding mechanism.

また、床面を構成する電波吸収体をいくつかのブロック
に分割して搬出入用開口から出入れするための搬送経路
の構成も複雑大型化することは明らかであった。
Furthermore, it was clear that the structure of the transport path for dividing the radio wave absorber constituting the floor surface into several blocks and loading and unloading the blocks through the loading and unloading openings would also be complicated and large.

(発明の目的) 本発明は一卜述した如き従来の電波暗室の有する欠陥に
鑑みてなされたものであって、測定機器笠の搬出入用大
面積開口にシールドを要せず、従つてシールドに伴うコ
ストを低減し得る電波暗室に於ける測定機器等の移送機
構を提供することを目的とする。
(Object of the Invention) The present invention was made in view of the defects of conventional anechoic chambers as mentioned above, and does not require a shield for the large opening for carrying in and out of the measuring equipment shade. An object of the present invention is to provide a mechanism for transporting measurement equipment, etc. in an anechoic chamber, which can reduce the costs associated with this.

(発明の概要) 上記目的を達成するため本発明は内壁を電波吸収体で被
覆した電波暗室本体一側壁の外側に導電材によって構成
した測定機器等収納室を連接するとともに、的記−側壁
に搬出入用扉を設け、該電波暗室本体の天井から該測定
機器等収納室の天井にかけて形成したスリットの天井裏
面に沿って測定機器等の懸吊装置を移動可能に支持し、
更に該スリット及び該移送装置を含む空間を導体シール
ド材により密封したものである。
(Summary of the Invention) In order to achieve the above object, the present invention connects a measuring equipment storage chamber made of a conductive material to the outside of one side wall of the anechoic chamber main body whose inner wall is coated with a radio wave absorber, A door for carrying in and out is provided, and a suspension device such as a measuring device is movably supported along the ceiling surface of a slit formed from the ceiling of the anechoic chamber main body to the ceiling of the measuring device storage chamber,
Further, a space including the slit and the transfer device is sealed with a conductive shield material.

(発明の実施例) 以下、添付図面に示した好適な実施例に基づいて本発明
の詳細な説明する。
(Embodiments of the Invention) Hereinafter, the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.

第1図は本発明の測定機器等の移送機構を適用した電波
暗室の構成例を示す縦断面図及びA−A線における拡大
断面図である。
FIG. 1 is a longitudinal cross-sectional view and an enlarged cross-sectional view taken along the line A-A, showing an example of the configuration of an anechoic chamber to which the transport mechanism for measuring instruments, etc. of the present invention is applied.

本図(a)に於いて、符号lは電波暗室本体であって大
面を導体にて構成した箱の天井2、側壁3及び床4に電
波吸収体5を貼り巡らせたものである。
In this figure (a), reference numeral 1 denotes the main body of a radio wave anechoic chamber, in which radio wave absorbers 5 are pasted around the ceiling 2, side walls 3, and floor 4 of a box whose large surface is made of a conductor.

断る電波暗室本体lの一側壁3の外側には電波暗室本体
I内で使用する各種測定機器を収納する為の電磁シール
ドされた部屋(以下、測定機器等収納室と称する)6を
連接し、これら両室1及び6の境界壁3の一部を所要面
積の扉7とする。
An electromagnetically shielded room (hereinafter referred to as a measuring equipment storage room) 6 for storing various measuring instruments used in the anechoic chamber main body I is connected to the outside of one side wall 3 of the anechoic chamber main body I, A part of the boundary wall 3 between these two chambers 1 and 6 is used as a door 7 having a required area.

前記測定機器等収納室6は金属の箱体であり。The measurement equipment storage chamber 6 is a metal box.

その側壁8適所には作業員が出入りするのに最低限必要
なサイズの出入口rR9を設けそのシールドを充分に行
う。
An entrance/exit rR9 of the minimum necessary size for workers to enter and exit is provided at a proper position on the side wall 8 to provide sufficient shielding.

又、前記測定機器等搬出入用rR,7はその暗室本体側
内壁に電波吸収体5を敷詰めておくことはいうまでもな
く、測定機器等10及びこれらを載置する台座11を床
面4上の電波吸収体5を越える高さまで吊上げた状態で
通過させ得べく、前記側壁3中の然るべき位置に於いて
十分な高さと幅を備えたものとする。
In addition, it goes without saying that the rR, 7 for carrying in and out of the measuring instruments, etc. is covered with radio wave absorbers 5 on the inner wall of the dark room main body side, and the measuring instruments, etc. 10 and the pedestal 11 on which they are placed are placed on the floor surface. The side wall 3 is provided with sufficient height and width at appropriate positions so that it can be passed through while being lifted up to a height exceeding the radio wave absorber 5 on the side wall 3.

上述した如く構成した電波暗室に於いて前記側壁3の前
記測定機器等搬出入用扉7の上縁部に相当する部分を介
して暗室本体1から機器等収納室6の天井にかけてスリ
ット12を形成し、該スリット12を貫通して電波暗室
本体1及び測定機器等収納6内に前記測定機器等を載置
した台座11を懸吊する為のケーブル13及びその先端
に設けたフック14を垂下せしめる。前記ケーブル13
の他端は詳細な図示を省略したホイスト15のケーブル
巻回機構に接続し、当該ホイスト15は電波暗室本体】
から測定機器等収納室6の天井裏面に於いて前記スリッ
ト12に沿って配置したレール16上を走行し得るよう
構成する。
In the anechoic chamber configured as described above, a slit 12 is formed extending from the darkroom main body 1 to the ceiling of the equipment storage room 6 via a portion of the side wall 3 corresponding to the upper edge of the door 7 for carrying in and out of measuring equipment, etc. Then, a cable 13 for suspending the pedestal 11 on which the measuring equipment, etc. is placed, and a hook 14 provided at its tip are allowed to hang down through the slit 12 into the anechoic chamber main body 1 and the measuring equipment storage 6. . The cable 13
The other end is connected to the cable winding mechanism of a hoist 15 (not shown in detail), and the hoist 15 is connected to the anechoic chamber main body]
It is constructed so that it can run on a rail 16 arranged along the slit 12 on the ceiling surface of the measuring equipment storage room 6.

尚、17は前記レール16及びこれに沿って走行するホ
イスト15を風雨から守る為の単なる屋根である。
Note that 17 is simply a roof for protecting the rail 16 and the hoist 15 running along it from wind and rain.

又、前記測定機器等収納室6の天井に設けた電波吸収体
5は当該室6の天井のスリット12からの電磁波の侵入
を防止する為当該スリットの両側に沿って所要列だけ配
置したものである。
Furthermore, the radio wave absorbers 5 installed on the ceiling of the measuring equipment storage room 6 are arranged in required rows along both sides of the slit 12 in the ceiling of the room 6 in order to prevent electromagnetic waves from entering through the slit 12. be.

以上の如く構成した電波暗室に於いては図からも明らか
な如く測定機器等10を載置した台座llを電波暗室本
体lと測定機器等収納室6との間で移動する場合には単
に前記両室間の境界を構成する扉7を開放し、前記ホイ
スト15から垂下するフック14にて前記台座11を所
要の高度まで吊り上げ然る後にホイスト15を所定の位
置まで移動すればよく、この移動には殆んど人力を要し
ないことが理解されよう。
As is clear from the figure, in the anechoic chamber configured as described above, when moving the pedestal 11 on which the measuring instruments etc. 10 are placed between the anechoic chamber main body 1 and the measuring instrument etc. storage chamber 6, simply All that is required is to open the door 7 that forms the boundary between the two rooms, lift the pedestal 11 to a required height using the hook 14 hanging from the hoist 15, and then move the hoist 15 to a predetermined position. It will be understood that almost no human effort is required.

ところでこのような電波暗室の電磁シールドの完全性に
ついて検討するに、先ず電波暗室本体1から測定機器等
収納室6にかけてこれら両室に天井に設けたスリット1
2から電磁波が侵入する虞れがあるように思われるが、
該スリット12の両側に電波吸収体5が密植されている
ので前記の危虞は実質的に問題とならない程度に押える
ことが可能であるし、前記測定機器等収納室に設ける人
孔程度の扉9のシールドを完璧に行えば電波暗室本体l
との境界壁を構成する大面積の扉7に対しては格別のシ
ールドは不要であるからシールドの完壁を期す為膨大な
コストを要しない。
By the way, when considering the completeness of the electromagnetic shielding in such an anechoic chamber, first of all, a slit 1 is provided in the ceiling between the anechoic chamber main body 1 and the measurement equipment storage chamber 6.
There seems to be a risk of electromagnetic waves entering from 2.
Since the radio wave absorbers 5 are densely planted on both sides of the slit 12, the above-mentioned danger can be suppressed to the extent that it does not become a problem in practice, and a door about the size of a manhole installed in the storage room for the measuring equipment, etc. If the shielding in step 9 is done perfectly, the anechoic chamber itself
Since a special shield is not required for the large-area door 7 constituting the boundary wall between the building and the building, a huge cost is not required to ensure complete shielding.

以上本発明の基本的実施例について説明したがより一層
厳密な電磁シールドを要求される場合には第2図に示す
如く前記ホイスト】5が走行する空間を導体カヴァ18
で密閉すればよい。
Although the basic embodiment of the present invention has been described above, when even more strict electromagnetic shielding is required, as shown in FIG.
It should be sealed tightly.

この際当該導体カヴァ18は例えば前記測定機器等収納
室6の天井裏面の一部に於いては、ネジ化めするように
しホイスト15のメンテナンスに便ならしむるようにし
た方がよかろう。
In this case, it would be better to screw the conductor cover 18 on a part of the back surface of the ceiling of the measuring equipment storage room 6, for example, to facilitate maintenance of the hoist 15.

以上本発明をその一実施例を以って説明したが本発明が
この実施例にのみ限定されるものでないことは自明であ
る。
Although the present invention has been described above using one embodiment thereof, it is obvious that the present invention is not limited only to this embodiment.

即ち、図示した電波吸収体5はもっとも一般的な中空コ
ーン状樹脂中にフェライト粉を分散すると共にその基底
部にフェライト板を設けたものであるが、これは板状或
はその他の形状の電波吸収体であってもよい。
That is, the illustrated radio wave absorber 5 has ferrite powder dispersed in the most common hollow cone-shaped resin, and a ferrite plate is provided at the base of the resin. It may also be an absorbent material.

又、上述の説明中にある測定機器等とは特性を測定すべ
きアンテナ等の被測定装置を含む概念であることも自明
である。
It is also obvious that the term "measuring equipment, etc." in the above description includes a device to be measured such as an antenna whose characteristics are to be measured.

(発明の効果) 本発明に係る電波暗室の測定機器等移送機構は上述した
如く構成するものであるから電波暗室本体に設ける必要
がある測定機器等搬出入用の大面8I!Rに格別の電磁
シールドを施こす必要がない故電波暗室全体の建設コス
トを大幅に低減することが可能となるのみならず、電波
暗室本体から測定機器等収納室に亙りホイストを移動自
在に設けたので測定機器等の移動に殆んど人力を要せず
作業の能率と安全性とを向上する上でも極めて効率的で
ある。
(Effects of the Invention) Since the transport mechanism for measuring instruments, etc. in the anechoic chamber according to the present invention is configured as described above, it is possible to use a large surface 8I for carrying in and out measuring instruments, etc., which needs to be provided in the anechoic chamber body! Not only is it possible to significantly reduce the construction cost of the entire anechoic chamber since there is no need to apply special electromagnetic shielding to R, but the hoist can be freely moved from the anechoic chamber itself to the measurement equipment storage room. Therefore, almost no human power is required to move measuring instruments, etc., and it is extremely efficient in improving work efficiency and safety.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す断面図、第2図はその
電磁シールドを改善した実施例を示す部分断面図である
。 l・・・電波暗室本体、2・・・天井、3・・・側壁、
4・・・床、5・・・電波吸収体、6・・・測定機器等
収納室、7・・・扉、】0.11・・・測定機器等、1
2・・・スリット、13・・・懸吊具、15・・・移送
装置、18・・・導体力バー
FIG. 1 is a sectional view showing one embodiment of the present invention, and FIG. 2 is a partial sectional view showing an embodiment with improved electromagnetic shielding. l... Anechoic chamber body, 2... Ceiling, 3... Side wall,
4... Floor, 5... Radio wave absorber, 6... Storage room for measuring equipment, etc., 7... Door, ]0.11... Measuring equipment, etc., 1
2...Slit, 13...Hanging device, 15...Transfer device, 18...Conductor force bar

Claims (1)

【特許請求の範囲】 1)天井、側壁及び床を電波吸収体で被覆した電波暗室
本体と、該電波暗室本体一側壁の外側に連設し、導体に
てシールドした測定機器等の収納室とを備え、前記電波
暗室と測定機器等の収納室との境界を構成する一側壁に
は測定機器搬出入用扉を、又前記電波暗室の天井から前
記測定機器等の収納室天井にかけてスリットを形成する
と共に上記両室天井裏面に於いて前記スリットに沿つて
測定機器等を懸吊するホイストを備えた移送装置を移動
自在に配置し、前記ホイストから前記スリットを介して
前記両室内に垂下する懸吊具によって測定機器等を懸吊
移動し得るようにしたことを特徴とする電波暗室におけ
る測定機器等の移送機構。 (2)前記スリット及びこれに沿って移動する移送装置
を前記両室の天井裏面に於いて全体的に覆う導体カヴァ
でシールトドしたことを特徴とする請求項(1)記載の
電波暗室における測定機器等の移送機構。
[Scope of Claims] 1) An anechoic chamber body whose ceiling, side walls, and floor are covered with a radio wave absorber, and a storage chamber for measuring instruments, etc., which is connected to the outside of one side wall of the anechoic chamber body and shielded with a conductor. A door for carrying in and out of measuring equipment is formed on one side wall forming a boundary between the anechoic chamber and a storage chamber for measuring instruments, etc., and a slit is formed from the ceiling of the anechoic chamber to the ceiling of the storage chamber for measuring instruments, etc. At the same time, a transfer device equipped with a hoist for suspending measurement equipment, etc. along the slit is movably arranged on the back of the ceiling of both rooms, and the suspension is suspended from the hoist into the both rooms through the slit. A mechanism for transporting measuring equipment, etc. in an anechoic chamber, characterized in that the measuring equipment, etc. can be suspended and moved using a hanging tool. (2) The measuring device in the anechoic chamber according to claim (1), characterized in that the slit and the transfer device that moves along the slit are shielded with a conductive cover that covers the entirety of the slit and the transfer device that moves along the slit. etc. transport mechanism.
JP22041590A 1990-08-21 1990-08-21 Transporting mechanism of measuring equipment and the like in electric wave dark room Pending JPH04102073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22041590A JPH04102073A (en) 1990-08-21 1990-08-21 Transporting mechanism of measuring equipment and the like in electric wave dark room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22041590A JPH04102073A (en) 1990-08-21 1990-08-21 Transporting mechanism of measuring equipment and the like in electric wave dark room

Publications (1)

Publication Number Publication Date
JPH04102073A true JPH04102073A (en) 1992-04-03

Family

ID=16750756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22041590A Pending JPH04102073A (en) 1990-08-21 1990-08-21 Transporting mechanism of measuring equipment and the like in electric wave dark room

Country Status (1)

Country Link
JP (1) JPH04102073A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5407853A (en) * 1988-11-09 1995-04-18 Hitachi, Ltd. Method of making semiconductor integrated circuit device having single-element type non-volatile memory elements
US5532704A (en) * 1993-06-15 1996-07-02 Siepel-Societe Industrielle D'etudes Et Protection Electroique Device for positioning antennas inside a measurment chamber of the anechoic or of the semi-anechoic type

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5656839A (en) * 1986-05-26 1997-08-12 Hitachi, Ltd. Semiconductor integrated circuit device having single-element type nonvolatile memory elements
US5656522A (en) * 1986-05-26 1997-08-12 Hitachi, Ltd. Method of manufacturing a semiconductor integrated circuit device having single-element type non-volatile memory elements
US5407853A (en) * 1988-11-09 1995-04-18 Hitachi, Ltd. Method of making semiconductor integrated circuit device having single-element type non-volatile memory elements
US5629541A (en) * 1988-11-09 1997-05-13 Hitachi, Ltd. Semiconductor memory device constituted by single transistor type non-volatile cells and facilitated for both electrical erasing and writing of data
US5904518A (en) * 1988-11-09 1999-05-18 Hitachi, Ltd. Method of manufacturing a semiconductor IC device having single transistor type nonvolatile memory cells
US6255690B1 (en) 1988-11-09 2001-07-03 Hitachi, Ltd. Non-volatile semiconductor memory device
US6451643B2 (en) 1988-11-09 2002-09-17 Hitachi, Ltd. Method of manufacturing a semiconductor device having non-volatile memory cell portion with single transistor type memory cells and peripheral portion with MISFETs
US6777282B2 (en) 1988-11-09 2004-08-17 Renesas Technology Corp. Method of manufacturing a semiconductor memory device having a memory cell portion including MISFETs with a floating gate and a peripheral circuit portion with MISFETs
US6960501B2 (en) 1988-11-09 2005-11-01 Renesas Technology Corp. Method of manufacturing a semiconductor memory device having a non-volatile memory cell portion with single misfet transistor type memory cells and a peripheral circuit portion with misfets
US7071050B2 (en) 1988-11-09 2006-07-04 Hitachi, Ltd. Semiconductor integrated circuit device having single-element type non-volatile memory elements
US7399667B2 (en) 1988-11-09 2008-07-15 Renesas Technology Corp. Method of manufacturing a semiconductor integrated circuit device having single-element type non-volatile memory elements
US5532704A (en) * 1993-06-15 1996-07-02 Siepel-Societe Industrielle D'etudes Et Protection Electroique Device for positioning antennas inside a measurment chamber of the anechoic or of the semi-anechoic type

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