JPH04100257U - - Google Patents
Info
- Publication number
- JPH04100257U JPH04100257U JP799791U JP799791U JPH04100257U JP H04100257 U JPH04100257 U JP H04100257U JP 799791 U JP799791 U JP 799791U JP 799791 U JP799791 U JP 799791U JP H04100257 U JPH04100257 U JP H04100257U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP799791U JPH04100257U (enExample) | 1991-01-30 | 1991-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP799791U JPH04100257U (enExample) | 1991-01-30 | 1991-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04100257U true JPH04100257U (enExample) | 1992-08-31 |
Family
ID=31740139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP799791U Pending JPH04100257U (enExample) | 1991-01-30 | 1991-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04100257U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02197574A (ja) * | 1989-01-26 | 1990-08-06 | Canon Inc | マイクロ波プラズマｃｖｄ法による堆積膜形成装置 |
| JPH0253964B2 (enExample) * | 1985-06-10 | 1990-11-20 | Fujitsu Ten Ltd |
-
1991
- 1991-01-30 JP JP799791U patent/JPH04100257U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0253964B2 (enExample) * | 1985-06-10 | 1990-11-20 | Fujitsu Ten Ltd | |
| JPH02197574A (ja) * | 1989-01-26 | 1990-08-06 | Canon Inc | マイクロ波プラズマｃｖｄ法による堆積膜形成装置 |