JPH04100255U - - Google Patents

Info

Publication number
JPH04100255U
JPH04100255U JP495691U JP495691U JPH04100255U JP H04100255 U JPH04100255 U JP H04100255U JP 495691 U JP495691 U JP 495691U JP 495691 U JP495691 U JP 495691U JP H04100255 U JPH04100255 U JP H04100255U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP495691U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP495691U priority Critical patent/JPH04100255U/ja
Publication of JPH04100255U publication Critical patent/JPH04100255U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP495691U 1991-02-08 1991-02-08 Pending JPH04100255U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP495691U JPH04100255U (enrdf_load_stackoverflow) 1991-02-08 1991-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP495691U JPH04100255U (enrdf_load_stackoverflow) 1991-02-08 1991-02-08

Publications (1)

Publication Number Publication Date
JPH04100255U true JPH04100255U (enrdf_load_stackoverflow) 1992-08-31

Family

ID=31735140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP495691U Pending JPH04100255U (enrdf_load_stackoverflow) 1991-02-08 1991-02-08

Country Status (1)

Country Link
JP (1) JPH04100255U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019104985A (ja) * 2017-12-13 2019-06-27 北京創▲いく▼科技有限公司 真空コーティング用集積チャンバ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019104985A (ja) * 2017-12-13 2019-06-27 北京創▲いく▼科技有限公司 真空コーティング用集積チャンバ

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