JPH0399766U - - Google Patents
Info
- Publication number
- JPH0399766U JPH0399766U JP840690U JP840690U JPH0399766U JP H0399766 U JPH0399766 U JP H0399766U JP 840690 U JP840690 U JP 840690U JP 840690 U JP840690 U JP 840690U JP H0399766 U JPH0399766 U JP H0399766U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- metal material
- film
- evaporation source
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 5
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims 3
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP840690U JPH0399766U (et) | 1990-01-31 | 1990-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP840690U JPH0399766U (et) | 1990-01-31 | 1990-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0399766U true JPH0399766U (et) | 1991-10-18 |
Family
ID=31512037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP840690U Pending JPH0399766U (et) | 1990-01-31 | 1990-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0399766U (et) |
-
1990
- 1990-01-31 JP JP840690U patent/JPH0399766U/ja active Pending