JPH0399766U - - Google Patents

Info

Publication number

JPH0399766U

JPH0399766U JP840690U JP840690U JPH0399766U JP H0399766 U JPH0399766 U JP H0399766U JP 840690 U JP840690 U JP 840690U JP 840690 U JP840690 U JP 840690U JP H0399766 U JPH0399766 U JP H0399766U

Authority

JP

Japan

Prior art keywords

substrate

metal material

film

evaporation source

vacuum

Prior art date

1990-01-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001704 evaporation Methods 0.000 claims description 5
• 230000008020 evaporation Effects 0.000 claims description 5
• 238000007738 vacuum evaporation Methods 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims description 4
• 239000000919 ceramic Substances 0.000 claims description 3
• 239000002184 metal Substances 0.000 claims description 3
• 239000007769 metal material Substances 0.000 claims 3
• 238000007740 vapor deposition Methods 0.000 claims 1
• 239000000463 material Substances 0.000 description 1