JPH0398939U - - Google Patents
Info
- Publication number
- JPH0398939U JPH0398939U JP474090U JP474090U JPH0398939U JP H0398939 U JPH0398939 U JP H0398939U JP 474090 U JP474090 U JP 474090U JP 474090 U JP474090 U JP 474090U JP H0398939 U JPH0398939 U JP H0398939U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum chamber
- pressure reducing
- reducing device
- gate valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Taps Or Cocks (AREA)
- Self-Closing Valves And Venting Or Aerating Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP474090U JPH084102Y2 (ja) | 1990-01-23 | 1990-01-23 | 真空装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP474090U JPH084102Y2 (ja) | 1990-01-23 | 1990-01-23 | 真空装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0398939U true JPH0398939U (en, 2012) | 1991-10-15 |
| JPH084102Y2 JPH084102Y2 (ja) | 1996-02-07 |
Family
ID=31508474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP474090U Expired - Lifetime JPH084102Y2 (ja) | 1990-01-23 | 1990-01-23 | 真空装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH084102Y2 (en, 2012) |
-
1990
- 1990-01-23 JP JP474090U patent/JPH084102Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH084102Y2 (ja) | 1996-02-07 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |