JPH0397925U - - Google Patents
Info
- Publication number
- JPH0397925U JPH0397925U JP569290U JP569290U JPH0397925U JP H0397925 U JPH0397925 U JP H0397925U JP 569290 U JP569290 U JP 569290U JP 569290 U JP569290 U JP 569290U JP H0397925 U JPH0397925 U JP H0397925U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- semiconductor thin
- sample
- decomposition device
- sample container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 9
- 238000000354 decomposition reaction Methods 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000007789 sealing Methods 0.000 claims 2
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP569290U JPH0397925U (enExample) | 1990-01-26 | 1990-01-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP569290U JPH0397925U (enExample) | 1990-01-26 | 1990-01-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0397925U true JPH0397925U (enExample) | 1991-10-09 |
Family
ID=31509391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP569290U Pending JPH0397925U (enExample) | 1990-01-26 | 1990-01-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0397925U (enExample) |
-
1990
- 1990-01-26 JP JP569290U patent/JPH0397925U/ja active Pending