JPH0397138U - - Google Patents
Info
- Publication number
- JPH0397138U JPH0397138U JP347890U JP347890U JPH0397138U JP H0397138 U JPH0397138 U JP H0397138U JP 347890 U JP347890 U JP 347890U JP 347890 U JP347890 U JP 347890U JP H0397138 U JPH0397138 U JP H0397138U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- flow path
- air flow
- path structure
- floor surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009423 ventilation Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990003478U JP2512775Y2 (ja) | 1990-01-18 | 1990-01-18 | クリ―ンル―ムの気流路構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990003478U JP2512775Y2 (ja) | 1990-01-18 | 1990-01-18 | クリ―ンル―ムの気流路構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0397138U true JPH0397138U (pt) | 1991-10-04 |
| JP2512775Y2 JP2512775Y2 (ja) | 1996-10-02 |
Family
ID=31507296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990003478U Expired - Lifetime JP2512775Y2 (ja) | 1990-01-18 | 1990-01-18 | クリ―ンル―ムの気流路構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2512775Y2 (pt) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0217286U (pt) * | 1988-07-18 | 1990-02-05 |
-
1990
- 1990-01-18 JP JP1990003478U patent/JP2512775Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0217286U (pt) * | 1988-07-18 | 1990-02-05 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2512775Y2 (ja) | 1996-10-02 |