JPH0396601A - Relative moving device - Google Patents

Abstract

PURPOSE:To prevent a moving member from being damaged as well as to make it possible to set a gap between the moving member and a stationary member close to zero by making up a film layer by means of flame spraying, which is mainly composed of hexagonal boron nitride powder, onto a part of the stationary member adjacent to the moving member. CONSTITUTION:When employed in a turbo-charger, a film layer 85 is built up on a part P of a turbo-housing 81 as a stationary member adjacent to a turbo-rotor 82 as a moving member. The aforesaid film layer 85 is made of an abrasive material which is composed of 5 to 45% hexagonal boron nitride powder by volume and of oxide powder comprising the remainder, while being formed with a generating surface 85 which is generated by means of flame spraying in such a way as to be cut by the moving member 82. Ceramic powder such as zirconiz alumina and the like shall by used as oxide powder, and plasma jet flame spraying, gas flame spraying and the like shall be employed as flame spraying.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a relative movement device having a movable member and a fixed member that move relatively to each other in close proximity under high temperature, such as a turbocharger or a gas turbine. In particular, the present invention relates to a relative movement device that can bring the gap between a fixed member and a movable member closer to O during operation.

[Prior Art] As a conventional relative displacement device, an automobile turbocharger shown in FIG. 20 will be described as an example. This turbocharger has a turbo rotor 100 and an impeller 200 as movable members, and a turbo housing 101 and a compressor housing 201 as fixed members. In such a turbocharger, a turbo rotor 100 is rotated by exhaust energy from an engine (not shown) to rotate a shaft 300, and rotation of a shaft 300 rotates an impeller 200 to supercharge air to the engine. It is something.

In this way, the turbo mouth motor 100 and the turbo housing 10
1 and Invera-200] Npressor housing 20
1 move close to each other under high temperature and move relative to each other during operation of the turbocharger.

By the way, it is known that the efficiency of the turbocharger can be improved by making the gap C100 between the turbo rotor 100 and the turbo housing 101 and the gap C200 between the impeller 200 and the compressor housing 201 as small as possible. However, these gaps CIOO,C200
If it is made small, the turbo rotor 100 may come into contact with or collide with the turbo housing 101 during operation, or the impeller 200 may come into contact with or collide with the compressor housing 201, due to slight eccentricity during the manufacture of the shaft 300. Rotor 100 and impeller 2
There was a possibility that 00 would become a member.

Therefore, in the conventional turbocharger V, the gap C10 between the tarpo rotor 100 and the turbo housing 101 is
0 is approximately 0.6 to 0.8 mm, and the gap C200 between the impeller 200 and compressor housing 201 is approximately 0.3 to 0.8 mm.
It needed to be 0.5 mm, which was insufficient in terms of efficiency.

As described above, it has been desired to develop a technique for relative movement devices that can improve efficiency by reducing the gap between the movable member and the fixed member as much as possible, and prevent damage to the movable member. Conventionally, as such a technique, a technique has been disclosed in which a coating layer containing a mixture of soft metal and resin or graphite is formed on the compressor housing side by melting. In this conventional technology, the formed film layer is easily scraped off when the impeller comes into contact with the compressor housing due to eccentricity of the shaft, etc., so the gap between the impeller and the compressor housing after being scraped off is reduced to O. You can approach it, you can do it. Note that this will not damage the impeller. Other techniques that utilize the machinability of the film layer to bring the gap between the movable member and the fixed member closer to O include Jibun Sho 49-18085 @ Publication and U.S. 1JI.
Allowed NO. There are 4405284. These disclose techniques for coating N1-graphite and N i CrFeAl -BN.

Also, US Patent No. No. 4,269,903 discloses a technique for coating porous stabilized zirconia with a porosity of 20 to 33% as a filler for Hiramic Seal. This technique is basically the same as the above invention, and this technique also reduces the gap between the movable member and the fixed member in the relative displacement device to O with the machinability of the porous stabilizing zirconia layer. You can get close.

[Problems to be Solved by the Invention] However, even if the relative displacement device is manufactured using the above-mentioned conventional technology, there are various drawbacks.

That is, U.S. Patent No. The technology disclosed in No. 4,269,903 uses zirconia, which is resistant to thermal shock, as the skin M'A layer in consideration of high-temperature use, and makes the zirconia porous to ensure machinability of the film layer. However, in the coating layer with a porosity of 20 to 33% that is thermally sprayed only with zirconia in this technology, since zirconia has a high hardness of V1000 or more, the movable member that is the counterpart material of the coating layer is The disadvantage is that it is easily abraded. In addition, if the skin IlA layer is made of zirconia with a porosity of 33% or more, for example 40%, in order to further improve the machinability of the film layer, the thermal shock resistance will decrease and the film layer will peel or fall off. It has the disadvantage of causing

In addition, Japanese Patent Application Laid-Open No. 18085/1973, US Patent No.
In the technology of No. 4405284, since the film is made of metal, it is impossible to withstand the high temperatures of up to approximately 10 oo'C that are applied to aircraft jet engines (gas turbine engines) for long periods of time, and it eventually oxidizes. It has the disadvantage that it cannot be repaired in the city because it corrodes.

The present invention has been made in view of the above-mentioned conventional difficulties in rigidity, and the present invention has been developed to provide a skin with a good cut ↑1 even when used at high temperatures! The purpose is to capture and provide relative movement devices equipped with

Although Japanese Patent Publication No. 50-690 is not a technology that utilizes the rigidity of the coating layer, it is an invention related to a gas turbine engine in which the turbine casing is shaped and sintered with a ceramic material that is softer than the turbine blades. This paper presents a technology to prevent turbine blade fracture. However, this technique has the drawback that the bonding strength of the ceramic material is weak and durability is lacking.

In addition, Japanese Patent Application Laid-Open No. 168926/1989 discloses that the inner surface of the turbo housing or compressor housing is coated with a composite material to optimize the gap between the turbo housing and the tarp rotor or the gap between the compressor housing and the impeller during operation. The technology is disclosed. However, this does not disclose the material of the coating layer.

[Means for Solving the Problems] The relative movement device of the present invention is a relative movement device having a movable member and a fixed member that move relatively to each other in close proximity under high temperature. The part adjacent to the movable member is formed by molten steel, and is made of hexagonal boron nitride powder with a dead volume of 5 to 45% and the remainder oxide powder, and is cut by the movable member to form a wound. It is characterized by comprising a film layer having a certain property.

The relative displacement device according to the present invention is a turbocharger V for an automobile or an aircraft, a gas turbine, or the like, and has a movable member and a fixed member that move relatively to each other in close proximity under high temperature. For example, if the Yuichi Bocharger is a relative moving device, the invera and turbo rotor are movable members, and the compressor housing and turbo housing are fixed members.If the gas turbine is a relative moving device, the turbine blades are movable. The turbine casing corresponds to the fixed part shrine.The relative movement between the movable part +A and the fixed member may be rotational movement or linear movement.

The portion of the fixed member adjacent to the movable member is provided with a skin TItA layer. The film layer is made of hexagonal boron nitride powder 5 to 4
An abradable material consisting of 5% by volume and 55 to 95% by volume of oxide powder is formed by thermal spraying.

As the boron nitride (BN) powder, a hexagonal one is used instead of a cubic one in order to obtain the effects of the present invention. This is because cubic BN powder is hard, and hexagonal BN powder is soft. Hexagonal product (hereinafter abbreviated) BN powder containing 5 to 45 volume (OQ)% of abradable + J 7
By adopting 3+, the effects of the present invention can be obtained.

If it is less than 5% by volume, the machinability of the coating layer will not be improved sufficiently, and if it exceeds 45% by volume, the machinability of the coating layer will be improved too much, resulting in a decrease in thermal shock resistance and a risk of peeling or falling off. This is because they are more likely to become former prisoners. In addition, it is practically preferable that the particle size of the BN powder is 5 to 50 μm.

As the oxide powder, ceramic powder such as zirconia (Zr02) or alumina (81203) can be used.The particle size of the oxide powder is practically preferably 10 to 100 μm.

As the melting method, a plasma jet copper melting method or a gas melting method can be adopted.

The film layer has a generated surface. Such a generating surface is created by climbing up the movable member and being cut during operation of the relative displacement device.

[Function] The relative displacement device of the present invention includes a film layer made of oxide and BN on a portion of the fixed member that is close to the movable member. In such a film layer, due to the properties of BN, BN particles 52 are formed at the boundaries of oxide particles 51, as schematically shown in FIG.
exists in a horizontal structure, and oxide particles 51 and BN particles 5
There are also pores 53 at the boundary between the two. In addition, the fixing member is indicated by the reference numeral 61 in the figure.

As schematically shown in FIG. 18, the present inventor believes that there are the following four types of mechanisms in which the film layer of the above structure is abraded by the movable member 62 that moves relative to the fixed member 61. Consider.

■ Shear fracture of oxide particles 51 (a-1>■ Falling off of oxide particles 51 with pores 53 as boundaries (a-2>) Falling off of oxide particles 51 with BN particles 52 as boundaries (a
-3> ■ Shear fracture 11 of BN particle 52 (a-4) On the other hand, the 19th
As schematically shown in the figure, it is considered that there are two types of mechanisms by which a conventional coating layer made only of oxides is abraded.

■ Shear fracture of oxide particles 51 (b-1>■ BQ drop of oxide particles 51 with pores 53 as boundaries (b-2)) Behind the above mechanism, shear fracture of oxide particles 51 (
a-1, b-1>, since the oxide particles 51 are very hard (for example, zirconia has a diameter of 1000 or more), it is thought that a large force is required.On the other hand, the shear failure of the BN particles 52 In (a-4), since the BN particles 52 are softer than the oxide particles 51 (approximately v3), it is thought that only a small force is required. a-3> is BN with low wettability
Since it is considered that the particles 52 are bonded to the oxide particles 51 by a weak bonding force, it is considered that a small force is required. Furthermore, it is considered that the oxide particles 51 falling off (a-2, b-2) with the pores 53 as the boundaries are due to the pores 53 existing at the boundaries and the oxide particles 51 being weakly adhered to each other. It is believed that moderate force is required.

Therefore, in the relative displacement device of the present invention, the movable member can abrade the coating area with a small or medium force without requiring a large force. For this reason, the membrane can be easily cut away without damaging the movable member, and the wound can be healed. Due to this generated surface, the gap between the movable member and the fixed member approaches O, thereby minimizing gas leakage, etc.
Increased efficiency.

Furthermore, in the relative displacement device of the present invention, the porosity of the coating layer is not increased, and the coating layer 11QIfi is not made of metal. Therefore, the skin n'A layer does not peel off, fall off, or corrode at high temperatures.

[Example] Hereinafter, an example embodied in a turbocharger will be described together with a comparative example.

Embodiment 1 This turbocharger, as shown in a partial sectional view in FIG. 1, is basically the same as the conventional one (see FIG. 20), and includes a turbo housing 81 with an inner diameter of 55 mm, The turbo rotor 82 is connected to a shaft 80. This turbo charger is provided with a coating 85 on a portion P of the turbo housing 81 adjacent to the turbo rotor 82. The steps for making this turbo housing are shown below.

■As shown in FIG.
The gap CO between the tarpolo rotor 82 and the tarp rotor 82 is about 0. It was 8 mm.

(2) A portion P of the turbo housing 81 adjacent to the tarp rotor 82 was shot blasted using calcined alumina powder having a particle size of 1,200 to 1,400 μm.

■As shown in Fig. 3, in order to improve adhesion to the shot-blasted portion P, i'N i CrA I (94 (80N i -
20Cr)-6A l) alloy 0.08~0.1mm
The alloy layer 84 was formed by plasma spraying to a thickness t1.

■ZrO2.8Y203 powder with a particle size of 10 to 74 μm (
Prepare a hexagonal BN powder (Shoden Vl-IP-EX) with a particle size of 35 to 45 μm, and
Mix 60% of 203 powder and 40% of BN powder by volume.
They were mixed to form an abradable material.

■ Plasma spray the above abradable material to a thickness t2 of approximately 1.0 mm on the portion P where the alloy layer 84 has been formed;
A skin WA layer 85 was formed.

■After the formation of the film layer 85, the gap C1 between the turbo housing 81 and the turbo rotor 82 is reduced to 0.0 by N(J! machining).
J; caries imitation 85 was processed to be 5 mm.

In this way, the turbocharger of Example 1 was created.

Example 2 This turbocharger V-jar is made of A as an abradable material.
The turbocharger was the same as that of Example 1, except that the turbocharger was made of I203 powder with 65% dead volume and BN powder with 35% dead volume. The A2 0 3 'Ft) powder (Meteco 101B> has a particle size of 35 to 74 μm, and the BN powder is the same as in Example 1.

Example 3 This tarpocharger is the same as the turbocharger of Example 1, except that the abradable material 1 is made of 60% dead volume of AI203 powder and 40% dead volume of BN powder. It is. d3, A1203 powder and BN
The powder is the same as that of Run 19+11.

Comparative Example 11 This turbocharger is basically the same as the turbocharger of Example 1, but the alloy layer 84 and the skin rI
The tA layer 85 was created without any formal restrictions.

Comparative Example 12 This turbocharger uses Z as an abradable material.
The turbocharger was the same as that of Example 1 except that rO2.20Y203 powder was used. Na'3, Zr0
The 2.20Y203 powder was manufactured by Showa Denko and had a particle size of 10 to 44 μm, and the porosity of the formed film layer was 28%.

<Comparative Example 13> This turbocharger uses N as an abradable material.
The material was the same as that of Example 1 except that 75 wt% of i powder and 25 wt% of graphite powder were used. In addition, N: Powder has a particle size of 10 to 74μ
Graph 7ite powder is manufactured by Perkin Elmer and has a particle size of 10 to 30 μm.

Comparative Example 14> This turbocharger has N as a 7-brake to double material.
i Example 1 except that 94.5 wt% of CrFeAl alloy powder and 5.5 wt% of BN powder were used.
It is the same as the turbo charger. In addition, N i
QrFeAl alloy has composition C'14%, Fe8.0
%, A! 93.5%, BN5.5%, NiBaQ, particle size 45-120tim.

The BN powder is the same as in Example 1.

Evaluation> As shown in FIG. 4, in the turbochargers of Examples 1 and 2, even if the shaft 80tfi is eccentric and the turbo rotor 82 contacts or collides with the skin V layer 85 during operation, the film on the turbo housing 81 is The layer 85 was easily abraded by the turbo rotor 82, creating a generated surface 851 in the coating layer 85. Therefore, this turbo charger was able to prevent damage to the turbo rotor 82.

In addition, using the turbochargers of Examples 1 and 2 and Comparative Example 11, the engine rotation speed was set at 100,000 pm. Efficiency (%) was marked with ○, and those considered to be inferior were marked with ×.The results are shown in Table 1.Based on these results, an evaluation was made.The results are shown in Table 2. Table 2 shows that the efficiency of the turbochargers of Examples 1 and 2 is improved by 5 to 6% compared to that of Comparative Example 11.
This is because the gap between the tarp rotor 82 and the tarp rotor 82 is set to 0/v, so that gas leakage can be minimized.

Roughly speaking, using the turbocharged V of Examples 1 and 3 and Comparative Examples 12, 13, and 14, we conducted a noise investigation during 300 hr operation, an investigation on the condition of the film layer after operation, and an investigation on the condition of the turbo rotor after operation. The turbochargers of Examples 1 and 3 had no abnormalities, as can be seen from the measurement of the maximum weight loss (g) of the turbo rotor after operation. On the other hand, Comparative Example 12
, No. 13, and No. 14 had poor machinability around the coating, so they produced abnormal noises when the tarpaulin rotor came into contact with them during operation. In addition, in the state of the coating layer after operation (for the turbochit Noge V of Comparative Examples 12 and 13, when the turbo rotor came into contact with the coating layer, the coating layer peeled off rather than being scraped). Furthermore, in the turbochargers of Comparative Examples 13 and 14, the coating layer was corroded.
For turbochargers 2 to 14, the rotor blades were deformed after operation, and the weight also decreased due to wear.

Therefore, the turbocharge V of Examples 1, 2, and 3 is
It has a coating layer with good machinability, which can prevent damage to the turbo rotor and improve efficiency.

[Test example] Next, the present invention will be explained using test examples.

(1) Test pieces of Examples 4 and 5 and Comparative Examples 15 to 20 were prepared using abradable materials whose compositions are shown in Table 3, and comparative tests were conducted on these abradable materials.

Each test piece was first coated with the NiC on a flat plate of S45 (Jj).
The R81 alloy was plasma melted to a thickness of 0.1 mm as a base material, and each abradable material was plasma sprayed to a thickness of 1 mm thereon. In addition, Zr02・
8YzO311 powder, A1203 powder, BN powder, and graphite powder are the same as described above. The mica powder is manufactured by ln Wadenko and has a particle size of 35 to 45μ. In addition, Zr0
2. All of the additives N other than A203 (BN powder, graphite powder, mica powder) have a product IWj4M structure, and have the property of easily separating themselves, resulting in good machinability of the coating layer. This is what I expected to happen.

The rigidity around the coating was evaluated on each of the test pieces of Examples 4 and 5 and Comparative Examples 15 to 20.As shown in The test was carried out by rotating a ring 90 made of Inconel in the direction of the arrow in the figure under the conditions of a surface load W of 150 g/mm2, a rotation speed of 100 Orpm, and a rotation time of 1 minute for 1 minute.
The depth to which the coating layer of each test piece was scraped by the ring 90 is defined as the cutting depth (mm>), and the aggressiveness against the opponent is defined as the ring wear m (mm).
q). The results are shown in Figure 6. From FIG. 6, the film layer containing BN in the test pieces of Examples 4 and 5 is as follows:
It can be seen that it is easy to scrape and is preferable.

On the other hand, in the test pieces of Comparative Examples 15 to 20, the coating layer containing graphite or mechanical force or the coating layer formed only with oxide had a cutting depth close to Qmm and a maximum ring wear. I know it's not good.

Moreover, FIG. 7 shows the results of measuring the hardness of the film layer of each test piece in Examples 4 and 5 and Comparative Examples 15 to 20. The measurement was based on the Vickers hardness under a load of 5 kCI. Roughly speaking, Fig. 8 shows a 400x scanning electron microscope (SEM) photo of the test piece of Comparative Example 15, Fig. 9 shows an SEX photo of the test piece of Comparative Example 17, and Fig. 10 shows the SEX photo of the test piece of Example 4. S of test piece
EM Photograph: FIG. 11 shows an SEM photograph of the test piece of Comparative Example 20. From these results, it can be seen that the coating layer containing BN in the test pieces of Examples 4 and 5 has BN also present in the structure, the hardness of the coating layer is small, and the coating layer has good machinability. In addition, this BN-containing film layer has poor wettability with surrounding oxides because BN is not an oxide, and is soft with a Mohs hardness of 1 to 2, so the bonding force between particles is weak and it is easily scraped. Recognize. On the other hand, as shown in FIG. 9, in the film layer containing graphite/cBG on the test piece of Comparative Example 17, the graphite was burned during melting, and almost no graphite was present in the structure. I can see that I can't see it. In addition, since the main components of Myiroku are SiO2 and AI203, which are the same oxides as the mixed alumina, etc., the wettability of the particles is also J:<
, and since it is itself harder than BN, it seems to form a relatively strong film layer. For this reason, Comparative Example 19
, 20 test pieces were harder and seemed to have poor rigidity compared to the test pieces of other comparative examples.

(2) The optimum value of BN was tested from the viewpoint of machinability and thermal shock properties.

Test from machinability> In the same manner as the test in (1) above, Z
rO2・8Y203 or AI203 and 10-50
A test piece having a skin v4 layer consisting of BN with a dead volume % was prepared. Then, the cutting depth of the coating layer in each test piece (mm
) and ring wear ffl(mc+) were measured in the same manner as in the test (1) above. The results are shown in Figure 2. As can be seen from Figure 12, the greater the amount of 8N in both the Z'O2.8Y203 series coating layer and the AI203 series coating layer, the better the machinability becomes. Considering this, it is considered that it is better to have a larger number of BNs.

Tests from thermal shock resistance> Skin containing BN! The thermal shock properties of Iffi were measured by a thermal cycle test. First, the above (1>
In the same manner as in the test, 50-100% by volume of ZrO2.
8Y2 03 or AI203 and O-y50 idle% BN
A test piece with a film layer consisting of was prepared. And 1
As a cycle, each specimen was
They were heated to about 1000° C. for 2 seconds and then quenched in water. The cycle was repeated until part or all of the film layer peeled off or fell off, and the thermal shock resistance was evaluated based on the number of cycles until peeling.The check was performed every 50 cycles, and the maximum resistance was 2,000 nicles. did.

The results are shown in FIG. As can be seen from FIG. 13, the thermal shock resistance improves when BN is about 5% by volume, reaches a maximum of 1 shift when BN is about 25% by volume, and decreases from about 45% by volume. At 50% by volume, peeling occurred in less than 200 cycles.

From the above machinability and thermal shock tests,
As shown in FIGS. 12 and 13, it was confirmed that 5 to 45 percent dead volume BN can form an effective film layer in terms of machinability and thermal shock resistance. Moreover, as for the oxide, Zr02.8Y203 is considered to be superior to AI203 in machinability and thermal shock resistance.

(3) The 8N-containing film layer according to the present invention and the prior art US Patent No. A comparative test of machinability and thermal shock resistance was conducted using a bolus film layer of 4269903.

In the same way as the test (1) above, Z of 50-90%
rO2・8Y203 or AI203 and 10-50% dead volume
A test piece having a film layer consisting of BN and BN was prepared. In addition, bolus ZrO2 20Y20 with a porosity of 20 to 33%
A test piece having No. 3 as a film layer was also prepared. The porosity (%) of each test piece is aligned on the same axis, and the cutting depth (mm) and ring wear f of each test piece are measured. (mg>). The results are shown in FIG. 14. As shown in FIG. 14, NO.
It can be seen that the coating layer containing BN according to the present invention has better machinability than the bolus coating layer of No. 4269903 that does not contain BN at the same porosity. The reason for this is
It is thought that the film layer according to the present invention is due to the presence of soft BN having a laminated structure in the grain boundaries of the oxide such as zirconia.

Further, the results of a thermal cycle test conducted in the same manner as the test (2) above are shown in FIG. As shown in Figure 15,
The film layer containing 8N has B at a porosity of 20 to 33%.
It has better thermal shock resistance than N-free skin nQ-tang. On the other hand, according to Fig. 14, if the porosity exceeds 40%, the machinability becomes high even in a film layer that does not contain BN, but the marshock resistance in such a case is as shown in Fig. 15. ; The sea urchin becomes extremely bad and cannot be put to practical use.

Therefore, the BN-containing coating layer according to the present invention has better machinability and malshock resistance than the conventional bolus coating layer.

(4> BN-containing film layer according to the present invention and the prior art disclosed in JP-A-49-18085 and U.S. Patent No. 4405)
A comparative corrosion test was conducted using a metal-based film layer mainly made of Ni such as that seen in No. 284.

In the same manner as the test (1) above, 75% by volume of ZrO2
Alternatively, a test piece having a film layer consisting of AI203 and 25% dead volume BN was prepared. Also, N1 and graph? A test piece with a skin IIi layer consisting of
A test piece with a film layer made of I alloy and BN was also prepared. Here, the film layer consisting of Ni and graphite is
It was formed using the abradable material used in Comparative Example 13 above. Further, the film layer made of the NiCrFeA+ alloy and BN was formed using the abradable material used in Comparative Example 14. Each test piece was kept in an atmospheric furnace maintained at 1000°C, and their weight was measured at appropriate times to determine the degree of oxidation based on the weight change (mQ>. The results are shown in Figure 16. As can be seen, the test piece with a film layer consisting of oxide and BN did not change in weight even at a high temperature of 1000'C, and no problems such as oxidation occurred.On the other hand, the test piece with a conventional Ni-based film layer The pieces are increasing in weight over time due to advanced oxidation.

Therefore, the BN-containing film layer according to the present invention does not need to be worried about corrosion compared to the conventional Ni-based film layer.

[Effects of the Invention] As detailed above, in the relative displacement device of the present invention, the portion of the fixed member adjacent to the movable member is shaped by the melting rule, and contains 5 to 45 volume % of hexagonal boron nitride powder and the remainder oxidized. Since it has a coating layer with a Ω1-formed surface created by cutting with a movable member, it is resistant to rigidity even at high temperatures. Therefore, in the relative displacement device of the present invention, the movable member is less likely to be damaged, and even when used for a long time at high temperatures, the film layer does not peel, fall off, or corrode, and the gap between the movable member and the fixed member is reduced. It has excellent efficiency and long life.

4. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a partial sectional view of a turbocharger according to an embodiment. FIG. 2, FIG. 3, and FIG. 4 are partially enlarged diagrams of the turbocharger of the embodiment. FIG. 5 is a perspective view showing the test method for the test piece. FIG. 6 and FIG. 7 are characteristic diagrams comparing the characteristics of the example and the comparative example. 8th
9 and 11 are microscopic photographs of test pieces of comparative examples.

FIG. 10 is a microscopic photograph of the test piece of the example.

FIGS. 12 and 13 are characteristic diagrams in the BN range according to the present invention. FIG. 14, FIG. 15, and FIG. 16 are characteristic diagrams comparing the characteristics of the example and the comparative example. 17th
18 and 18 are schematic cross-sectional views showing the hidden features of the function of the present invention, and FIG. 19 is a schematic cross-sectional view showing the reason for the conventional function. FIG. 20 is a sectional view of a conventional turbocharger.

82... Turbo rotor (movable member) 81... Turbo housing (fixed member) P... Adjacent portion 85... Film layer 851... Patent attorney Toyota Motor Corporation Hiroshi Shiokawa 851...Creation Mask Figure 5 Figure 6 300 200 100 80 60 40 20 O-ring wear amount (mg) Figure 7 Mouth Comparison Example No. Figure 12 Figure 13 Kuun Z102/8Y203 Mouth AI203 O 5 l0 2S 40 45 50 BN (vol%) 0 Fig. 14 Fig. 16 100 Time (}tr) 200 300 Fig. 18 Fig. 15 10 vol% BN Porosity (%) Procedure Correction m< method) Heian 2nd year 1
Month 12th Figure 20 1. Indication of the incident IR1 year patent application iI233845 2. Name of the invention: Relative movement seal 3. Relationship with the case of the person making the amendment Patent applicant: 1 (320) Toyota-cho, Toyota City, Aichi Prefecture Representative of Toyota Motor Corporation Shiro Sasaki 4. Agent Address: 4 Hira, 3-3 Meieki, Nakamura-ku, Nagoya, Aichi Prefecture 450 December 11, 2016 6. Column 7 for a brief explanation of the drawings in the specification to be amended. Contents of the amendment (1) On page 29, line 10 of the specification, the phrase "microphotograph of the test piece" is amended to read "microphotograph showing the grain structure of the test piece."

(2> In the 29th page, line 11 of the specification, the phrase "microphotograph of the test piece" is corrected to "microphotograph showing the grain structure of the test piece."

that's all

Claims (1)

[Claims] (1) A relative movement device having a movable member and a fixed member that move relatively close to each other under high temperature, wherein a portion of the fixed member that is close to the movable member is formed by thermal spraying,
1. A relative displacement device comprising a film layer comprising 5 to 45% by volume of hexagonal boron nitride powder and the balance oxide powder, and having a generated surface created by being cut by the movable member.