JPH0395652U - - Google Patents
Info
- Publication number
- JPH0395652U JPH0395652U JP197590U JP197590U JPH0395652U JP H0395652 U JPH0395652 U JP H0395652U JP 197590 U JP197590 U JP 197590U JP 197590 U JP197590 U JP 197590U JP H0395652 U JPH0395652 U JP H0395652U
- Authority
- JP
- Japan
- Prior art keywords
- self
- propelled
- semiconductor wafer
- orientation flat
- aligning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP197590U JPH0395652U (cs) | 1990-01-12 | 1990-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP197590U JPH0395652U (cs) | 1990-01-12 | 1990-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0395652U true JPH0395652U (cs) | 1991-09-30 |
Family
ID=31505859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP197590U Pending JPH0395652U (cs) | 1990-01-12 | 1990-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0395652U (cs) |
-
1990
- 1990-01-12 JP JP197590U patent/JPH0395652U/ja active Pending