JPH0395645U - - Google Patents

Info

Publication number
JPH0395645U
JPH0395645U JP225690U JP225690U JPH0395645U JP H0395645 U JPH0395645 U JP H0395645U JP 225690 U JP225690 U JP 225690U JP 225690 U JP225690 U JP 225690U JP H0395645 U JPH0395645 U JP H0395645U
Authority
JP
Japan
Prior art keywords
metal film
shield metal
probe needle
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP225690U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP225690U priority Critical patent/JPH0395645U/ja
Publication of JPH0395645U publication Critical patent/JPH0395645U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の一実施例であるプローブ針
の使用状態を示す説明図、第２図は従来のプロー
ブ針の説明図である。 図において、１……タングステン針、２……絶
縁物、３……シールド金属皮膜、４……ガード金
属皮膜、５……測定器、６……低雑音ケーブル、
７……コネクタ、８……シールドを示す。なお、
図中、同一符号は同一、または相当部分を示す。 FIG. 1 is an explanatory view showing how a probe needle according to an embodiment of this invention is used, and FIG. 2 is an explanatory view of a conventional probe needle. In the figure, 1... Tungsten needle, 2... Insulator, 3... Shield metal film, 4... Guard metal film, 5... Measuring device, 6... Low noise cable,
7...Connector, 8...Shield. In addition,
In the figures, the same reference numerals indicate the same or corresponding parts.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体評価に使用するプローブ針において、最
外皮のシールド金属皮膜の内側にシールド金属皮
膜を形成したことを特徴とする微小電流測定用プ
ローブ針。 A probe needle for microcurrent measurement used for semiconductor evaluation, characterized in that a shield metal film is formed inside the outermost shield metal film.
JP225690U 1990-01-11 1990-01-11 Pending JPH0395645U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP225690U JPH0395645U (en) 1990-01-11 1990-01-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP225690U JPH0395645U (en) 1990-01-11 1990-01-11

Publications (1)

Publication Number Publication Date
JPH0395645U true JPH0395645U (en) 1991-09-30

Family

ID=31506134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP225690U Pending JPH0395645U (en) 1990-01-11 1990-01-11

Country Status (1)

Country Link
JP (1) JPH0395645U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002022807A (en) * 2000-07-11 2002-01-23 Ricoh Co Ltd Inspection apparatus for circuit board
JP2017102002A (en) * 2015-12-01 2017-06-08 三菱電機株式会社 Check device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002022807A (en) * 2000-07-11 2002-01-23 Ricoh Co Ltd Inspection apparatus for circuit board
JP2017102002A (en) * 2015-12-01 2017-06-08 三菱電機株式会社 Check device

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