JPH0392766U - - Google Patents

Info

Publication number
JPH0392766U
JPH0392766U JP15294889U JP15294889U JPH0392766U JP H0392766 U JPH0392766 U JP H0392766U JP 15294889 U JP15294889 U JP 15294889U JP 15294889 U JP15294889 U JP 15294889U JP H0392766 U JPH0392766 U JP H0392766U
Authority
JP
Japan
Prior art keywords
hearth
shutter
vapor
deposited
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15294889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15294889U priority Critical patent/JPH0392766U/ja
Publication of JPH0392766U publication Critical patent/JPH0392766U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP15294889U 1989-12-28 1989-12-28 Pending JPH0392766U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15294889U JPH0392766U (US20090163788A1-20090625-C00002.png) 1989-12-28 1989-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15294889U JPH0392766U (US20090163788A1-20090625-C00002.png) 1989-12-28 1989-12-28

Publications (1)

Publication Number Publication Date
JPH0392766U true JPH0392766U (US20090163788A1-20090625-C00002.png) 1991-09-20

Family

ID=31699184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15294889U Pending JPH0392766U (US20090163788A1-20090625-C00002.png) 1989-12-28 1989-12-28

Country Status (1)

Country Link
JP (1) JPH0392766U (US20090163788A1-20090625-C00002.png)

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