JPH0392042U - - Google Patents
Info
- Publication number
- JPH0392042U JPH0392042U JP15291989U JP15291989U JPH0392042U JP H0392042 U JPH0392042 U JP H0392042U JP 15291989 U JP15291989 U JP 15291989U JP 15291989 U JP15291989 U JP 15291989U JP H0392042 U JPH0392042 U JP H0392042U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- insulator
- electrodes
- holder
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15291989U JPH0392042U (de) | 1989-12-29 | 1989-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15291989U JPH0392042U (de) | 1989-12-29 | 1989-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0392042U true JPH0392042U (de) | 1991-09-19 |
Family
ID=31699155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15291989U Pending JPH0392042U (de) | 1989-12-29 | 1989-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0392042U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010129879A (ja) * | 2008-11-28 | 2010-06-10 | Fuji Mach Mfg Co Ltd | 基板支持装置 |
-
1989
- 1989-12-29 JP JP15291989U patent/JPH0392042U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010129879A (ja) * | 2008-11-28 | 2010-06-10 | Fuji Mach Mfg Co Ltd | 基板支持装置 |