JPH0390433U - - Google Patents
Info
- Publication number
- JPH0390433U JPH0390433U JP15202089U JP15202089U JPH0390433U JP H0390433 U JPH0390433 U JP H0390433U JP 15202089 U JP15202089 U JP 15202089U JP 15202089 U JP15202089 U JP 15202089U JP H0390433 U JPH0390433 U JP H0390433U
- Authority
- JP
- Japan
- Prior art keywords
- heating section
- tank
- substrate
- semiconductor manufacturing
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 239000007791 liquid phase Substances 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15202089U JPH0390433U (en:Method) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15202089U JPH0390433U (en:Method) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0390433U true JPH0390433U (en:Method) | 1991-09-13 |
Family
ID=31698300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15202089U Pending JPH0390433U (en:Method) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0390433U (en:Method) |
-
1989
- 1989-12-28 JP JP15202089U patent/JPH0390433U/ja active Pending