JPH0390432U - - Google Patents

Info

Publication number

JPH0390432U

JPH0390432U JP15215389U JP15215389U JPH0390432U JP H0390432 U JPH0390432 U JP H0390432U JP 15215389 U JP15215389 U JP 15215389U JP 15215389 U JP15215389 U JP 15215389U JP H0390432 U JPH0390432 U JP H0390432U

Authority

JP

Japan

Prior art keywords

rings

static pressure

reaction tube

seal portion

space

Prior art date

1989-12-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000003068 static effect Effects 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 2
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
• 239000007789 gas Substances 0.000 claims 1
• 239000012495 reaction gas Substances 0.000 claims 1
• 235000012431 wafers Nutrition 0.000 claims 1
• 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1

Cited By (3)