JPH0390428U - - Google Patents

Info

Publication number
JPH0390428U
JPH0390428U JP15154689U JP15154689U JPH0390428U JP H0390428 U JPH0390428 U JP H0390428U JP 15154689 U JP15154689 U JP 15154689U JP 15154689 U JP15154689 U JP 15154689U JP H0390428 U JPH0390428 U JP H0390428U
Authority
JP
Japan
Prior art keywords
alignment marks
wafer
exposure apparatus
photomask
distances
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15154689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15154689U priority Critical patent/JPH0390428U/ja
Publication of JPH0390428U publication Critical patent/JPH0390428U/ja
Pending legal-status Critical Current

Links

JP15154689U 1989-12-28 1989-12-28 Pending JPH0390428U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15154689U JPH0390428U (US20090163788A1-20090625-C00002.png) 1989-12-28 1989-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15154689U JPH0390428U (US20090163788A1-20090625-C00002.png) 1989-12-28 1989-12-28

Publications (1)

Publication Number Publication Date
JPH0390428U true JPH0390428U (US20090163788A1-20090625-C00002.png) 1991-09-13

Family

ID=31697841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15154689U Pending JPH0390428U (US20090163788A1-20090625-C00002.png) 1989-12-28 1989-12-28

Country Status (1)

Country Link
JP (1) JPH0390428U (US20090163788A1-20090625-C00002.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6345818A (ja) * 1986-08-13 1988-02-26 Nec Corp 半導体製造装置の位置合わせ方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6345818A (ja) * 1986-08-13 1988-02-26 Nec Corp 半導体製造装置の位置合わせ方法

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