JPH0389949A - Nitrogen globe box - Google Patents

Abstract

PURPOSE:To maintain clean environment by providing a circulation pump for force-feeding gaseous nitrogen in a hermetic box into a nitrogen tank to an exhaust pipe and providing a regulator for supplying gaseous nitrogen to a feed pipe so that the inside of the hermetic box is regulated at the constant pressure. CONSTITUTION:A nitrogen tank 3 communicates with a hermetic box 1 which is equipped with the globes 6 for work and filled with gaseous nitrogen via a feed pipe 2 and an exhaust pipe 20. Further the gas in the hermetic box 1 is force-fed into a nitrogen tank 3 by a circulation pump 22 provided to the exhaust pipe 20. Furthermore gaseous nitrogen is supplied by a regulator 4 provided to the feed pipe 2 so that the inside of the hermetic box 1 is regulated at the constant pressure. A filter 23 is provided to the outlet of the feed pipe 2. As a result, the inside of the hermetic box can be easily maintained in the clean environment and also consumption of gaseous nitrogen is lowered.

Description

DETAILED DESCRIPTION OF THE INVENTION (Technical Field of the Invention) The present invention relates to a nitrogen clove box that operates in a closed nitrogen atmosphere.

(Technical Background of the Invention) Conventionally, electronic components such as semiconductors have been housed in ceramic boxes. In such electronic components, first, a semiconductor chip is fixed to a curved ceramic head with a concave cross section, and electrical wiring is performed by wire bonding, etc. A metal lid is placed on the lid, and its peripheral edge is seam-welded to secure the lid.

However, it is necessary to carry out the work of housing and sticking such semiconductor chips in a clean environment free of dust, etc., and in a chemically stable atmosphere such as nitrogen gas. I try to use a corf box. This nitrogen clove box is airtightly attached to one side of a sealed box filled with nitrogen, in order for the worker to insert both hands from outside the box.The worker then inserts both hands into the clove box. The work is carried out in a closed box.

Fig. 2 is a flock diagram showing an example of a conventional nitrogen loaf box. Nitrogen gas at a pressure slightly higher than atmospheric pressure is supplied from a nitrogen tank 3 to a nearly rectangular sealed box 1 via an air supply pipe 2, and the box is sealed. I try to keep the inside of Box 1 clean. The air supply pipe 2 is provided with a regulator 4 that adjusts the pressure of the nitrogen gas to be supplied to a constant pressure slightly higher than that of the atmosphere.

The front surface of the closed box 1 is provided with a double-door structure carrying out/eye opening 05 for carrying parts in and out, and a clove 6 for inserting both hands of the operator. Further, the sealed box 1 is provided with a leaf valve 7 and a pressure sensor 8 for discharging the nitrogen gas inside.

Note that 9 is the exhaust valve of the air supply pipe 3, and 10 is the JT of the nitrogen tank 2.
= air valve and supply valve; 11 is a pressure sensor for the nitrogen tank 2;

When working with such a configuration ζ (departure/population 5)
As nitrogen gas escapes into the atmosphere through the double doors of
The gas is supplied to the interior of the gas tank, maintained at a constant pressure, and subjected to operations such as sealing semiconductor chips under a nitrogen atmosphere.

(Problems with the background art) However, with such products, dust generated due to sealing work inside the sealed box, or dust that is attached to the product and brought in from outside, stays in the sealed box. There was a problem that the gas inside gradually became polluted and it became impossible to maintain a clean environment.

In addition, cleaning the inside of the sealed box (scrubbing requires releasing dirty nitrogen gas with floating dust and replacing it with clean nitrogen gas, or is there a problem with increasing nitrogen gas consumption with this method? there were.

(Objective of the Invention) The present invention was made in view of the dual circumstances, and it is possible to easily maintain a clean environment inside the sealed box,
Moreover, it is an object of the present invention to provide a nitrogen glove box that consumes less nitrogen gas.

(Summary of the Invention) The present invention provides a working clove in a closed box and fills it with nitrogen gas, and also communicates the nitrogen tank with the nitrogen tank through an air supply pipe and an exhaust pipe. A circulation pump is installed to forcefully pump gas into the nitrogen tank.
The air supply pipe is characterized by being equipped with a regulator that supplies nitrogen gas to maintain a constant pressure inside the airtight box and a filter that blocks dust.

(Embodiment) Hereinafter, an embodiment of the present invention will be described in detail with reference to a block diagram (not shown). Note that the same members as in FIG. 2 are given the same reference numerals 1'' and their explanations will be omitted.

In the figure, 20 is an exhaust pipe, on the artificial side there is a filter 21 for filtering dust in the nitrogen gas, and in the middle there is a circulation pump 22 for pumping the nitrogen gas in the sealed box 1 into the nitrogen tank 3.
has been established.

The outlet Z of the air supply pipe 2 is provided with an air filter 23 capable of removing fine dust floating in the nitrogen gas.

With such a configuration, the nitrogen gas in the sealed box 1 is sent under pressure to the nitrogen tank 3 by the circulation pump 22 via the exhaust pipe 20, and the nitrogen gas in the nitrogen tank 3 is sent from the regulator 4 to the air supply pipe 2 and the air filter. The loop that reaches the inside of the sealed box 1 through the filter 21.23 can be circulated to remove floating dust. It can be easily removed using the air filter 23 to maintain a clean environment.

Since the nitrogen gas is recycled and used, there is less loss and consumption can be reduced, making it possible to reduce operating costs.

(Effects of the Invention) As detailed above, the present invention can provide a nitrogen clove box that can maintain a clean working environment, consume less nitrogen gas, and reduce working costs. .

[Brief explanation of drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a block diagram showing an example of a conventional nitrogen clove box. 1... Airtight hook 2... Air supply pipe 3... Nitrogen tank 4... Reculake 6... Rikoats 20... Exhaust pipe 21. ... Filter 22 ... Circulation pump 23 ... Air filter

Claims (1)

[Scope of Claims] A sealed box provided with work gloves and filled with nitrogen gas, a nitrogen tank connected to the sealed box via an air supply pipe and an exhaust pipe, and a nitrogen tank provided in the exhaust pipe and filled with nitrogen gas. a circulation pump that pumps gas into the nitrogen tank, a regulator that is installed in the air supply pipe and that feeds nitrogen gas so as to maintain a constant pressure inside the sealed box, and a filter that is installed at the outlet of the air supply pipe. A nitrogen glove box characterized by comprising the following.