JPH0389162U - - Google Patents
Info
- Publication number
- JPH0389162U JPH0389162U JP14840889U JP14840889U JPH0389162U JP H0389162 U JPH0389162 U JP H0389162U JP 14840889 U JP14840889 U JP 14840889U JP 14840889 U JP14840889 U JP 14840889U JP H0389162 U JPH0389162 U JP H0389162U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- high frequency
- bearing
- member provided
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14840889U JPH0389162U (show.php) | 1989-12-22 | 1989-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14840889U JPH0389162U (show.php) | 1989-12-22 | 1989-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0389162U true JPH0389162U (show.php) | 1991-09-11 |
Family
ID=31694857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14840889U Pending JPH0389162U (show.php) | 1989-12-22 | 1989-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0389162U (show.php) |
-
1989
- 1989-12-22 JP JP14840889U patent/JPH0389162U/ja active Pending