JPH0389038A - Jogging guide mechanism - Google Patents

Jogging guide mechanism

Info

Publication number
JPH0389038A
JPH0389038A JP22171589A JP22171589A JPH0389038A JP H0389038 A JPH0389038 A JP H0389038A JP 22171589 A JP22171589 A JP 22171589A JP 22171589 A JP22171589 A JP 22171589A JP H0389038 A JPH0389038 A JP H0389038A
Authority
JP
Japan
Prior art keywords
force
spring
permanent magnets
movable body
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22171589A
Other languages
Japanese (ja)
Inventor
Toshihiko Watanabe
利彦 渡辺
Hideji Ishimaru
英児 石丸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FDK Corp
Original Assignee
FDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FDK Corp filed Critical FDK Corp
Priority to JP22171589A priority Critical patent/JPH0389038A/en
Publication of JPH0389038A publication Critical patent/JPH0389038A/en
Pending legal-status Critical Current

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  • Vibration Prevention Devices (AREA)

Abstract

PURPOSE:To reduce restoring force in the guided direction accompanied by elastic deformation and enable the decrease in movement in the orthogonal direction to the guided direction and the increase in allowable load by generating force in the opposite direction to the restoring force caused by the elastic deformation of a spring accompanied by the displacement of a movable body by a magnetic force generating means. CONSTITUTION:Permanent magnets 11, 12 and 13, 14 are respectively disposed in mutually reversed polarity, and the permanent magnets 11, 13 and 12, 14 are disposed in the state of mutual like-poles facing each other. Permanent magnets 17, 18 and 15, 16 are disposed likewise in mutually reversed polarity, and the permanent magnets 15, 17 and 16, 18 are disposed in the state of mutual like-poles facing each other. Magnetic resiliency in the Y direction does not act upon the outside in the case of fixed plates 3, 4 being connected. On the other hand, the combined force of spring restoring force accompanied by the displacement of a movable plate 5 and magnetic force (force in the X direction) generated by the permanent magnets 11-18 can be made close to zero. The outer force required to displace a movable body can be therefore reduced.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は、比較的短いストロークの直線案内や微動台
の案内機構として利用される微動案内機構に関し、特に
、固定体と可動体との間にバネを介在させ、このバネの
弾性変形により可動体を特定の運動方向に案内する機構
の改良に関する。
Detailed Description of the Invention (Industrial Application Field) The present invention relates to a fine movement guide mechanism used as a relatively short stroke linear guide or a fine movement table guide mechanism, and particularly relates to a fine movement guide mechanism used as a guide mechanism for a relatively short stroke linear guide or a fine movement table. The present invention relates to an improvement in a mechanism for guiding a movable body in a specific direction of movement by interposing a spring in the spring and elastically deforming the spring.

(従来の技術) 板バネや線バネを適当に配置し、可動体をバネの配置に
応じた特定方向に案内する機構は、バネの撓みを利用す
る案内機構なので、摺動や転勤にともなう摩擦抵抗や摩
耗がなく滑らかな運動を実現する手段として知られてい
る。この種の微動案内機構の代表的な例として第5図の
構成を挙げることができる。
(Prior art) A mechanism for properly arranging plate springs or wire springs and guiding a movable body in a specific direction according to the arrangement of the springs is a guidance mechanism that utilizes the deflection of the springs, so there is no friction due to sliding or transfer. It is known as a means of achieving smooth movement without resistance or wear. A typical example of this type of fine movement guide mechanism is the configuration shown in FIG.

第5図において、板バネ1,2は図示のような形状に成
形され二つの固定板3,4および可動板5の両端に固定
されている。固定板3,4を図示しない手段により連結
してかつ観測する座標系に対して固定する。可動板4は
、板バネ1.2の撓みにより図中のX方向には比較的容
易に運動することができる。可動板4のY方向およびZ
方向の運動に対しては板バネ1.2が撓み難い形状にな
っているので効果的に運動を拘束している。このような
案内機構の具体例の特性については、例えば、「鹿野、
長谷部、伊藤、黄、山田: “新しい支持・位置検出機
構を用いたリニア直流モータの動作特性”電気学会リニ
アドライブ研究会資料、LD−88−22,1988J
に詳しく述べられている。
In FIG. 5, leaf springs 1 and 2 are formed into the shape shown and are fixed to both ends of two fixed plates 3 and 4 and a movable plate 5. As shown in FIG. The fixed plates 3 and 4 are connected by means not shown and fixed relative to the coordinate system to be observed. The movable plate 4 can be relatively easily moved in the X direction in the figure by the deflection of the leaf spring 1.2. Y direction and Z direction of movable plate 4
Since the leaf spring 1.2 has a shape that makes it difficult to bend against movement in this direction, the movement is effectively restrained. Regarding the characteristics of a specific example of such a guide mechanism, see, for example, "Kano,
Hasebe, Ito, Huang, Yamada: “Operating Characteristics of Linear DC Motor Using New Support and Position Detection Mechanism” IEEJ Linear Drive Study Group Materials, LD-88-22, 1988J
is described in detail.

(発明が解決しようとする課題) 本発明が対象としている案内機構はバネの弾性変形を利
用するのでバネの復元力により案内方向の移動に対して
元の位置に可動体をひきもどす力が発生するという欠点
を持っている。また、第5図の機構において、案内方向
と直交するY、Z方向の動きをさらに低減したり、Y、
Z方向の許容荷重を増加するため板バネ1,2の板厚を
増加させると案内方向で発生する復元力も増加すること
になる。
(Problems to be Solved by the Invention) The guide mechanism targeted by the present invention utilizes the elastic deformation of a spring, so the restoring force of the spring generates a force that returns the movable body to its original position against movement in the guide direction. It has the disadvantage of being In addition, in the mechanism shown in Fig. 5, the movement in the Y and Z directions perpendicular to the guide direction can be further reduced, and
If the thickness of the leaf springs 1 and 2 is increased in order to increase the allowable load in the Z direction, the restoring force generated in the guide direction will also increase.

本発明の目的は、バネの弾性変形を利用する前述のよう
な微動案内機構において、弾性変形に伴う案内方向の復
元力を低減し、案内方向と直交する方向の動きの低減や
許容荷重の増加を可能とする手段を提供することにある
The purpose of the present invention is to reduce the restoring force in the guide direction due to elastic deformation in the above-mentioned fine movement guide mechanism that utilizes elastic deformation of a spring, reduce movement in a direction perpendicular to the guide direction, and increase allowable load. The goal is to provide a means to make this possible.

(課題を解決するための手段〉 そこでこの発明では、固定体と可動体との間にバネを介
在させ、このバネの弾性変形により可動体を特定の運動
方向に案内する機構において、永久磁石による磁気的吸
引反発力を発生する磁気力発生手段を前記固定体と前記
可動体とにわたって配設し、前記可動体の変位にともな
う前記バネの弾性変形による復元力と反対方向の力が前
記磁気力発生手段によって生じるように構成した。
(Means for Solving the Problem) Therefore, in the present invention, a spring is interposed between a fixed body and a movable body, and in a mechanism that guides the movable body in a specific movement direction by elastic deformation of this spring, a permanent magnet is used. A magnetic force generating means for generating a magnetic attraction and repulsion force is disposed between the fixed body and the movable body, and a force in a direction opposite to the restoring force due to the elastic deformation of the spring due to the displacement of the movable body is the magnetic force. It is configured to be generated by a generating means.

(作 用) 外部から力を加えて前記可動体を案内方向に変位させる
と、その変位方向と反対方向に前記バネの復元力が生じ
るとともに、前記磁気力発生手段により変位方向の力が
生じる:このバネ復元力と磁気力とは互いに打ち消し合
うことになり、その力の差分が可動体を変位させるのに
必要な外部力である。
(Function) When an external force is applied to displace the movable body in the guiding direction, a restoring force of the spring is generated in a direction opposite to the direction of displacement, and a force in the direction of displacement is generated by the magnetic force generating means: The spring restoring force and the magnetic force cancel each other out, and the difference between the forces is the external force necessary to displace the movable body.

(実施例) 第1図は本発明の第1実施例による微動案内機構の要部
を示している。基本的な構成は第5図と同じであり、固
定板3,4を図示しない手段により連結してかつ観測す
る座標系に対して固定する。
(Embodiment) FIG. 1 shows the main parts of a fine movement guide mechanism according to a first embodiment of the present invention. The basic configuration is the same as that in FIG. 5, and the fixed plates 3 and 4 are connected by means not shown and fixed relative to the coordinate system to be observed.

可動板4は、板バネ1,2の撓みにより図中のX方向に
は比較的容易に運動することができる。可動板4のYお
よび2方向の運動に対しては板バネ1.2が撓み難い形
状になっているので効果的に運動を拘束している。この
基本構成に以下の磁気力発生手段を付加している。
The movable plate 4 can be relatively easily moved in the X direction in the figure by the deflection of the leaf springs 1 and 2. With respect to the movement of the movable plate 4 in the Y direction and the two directions, the leaf spring 1.2 has a shape that makes it difficult to bend, so that the movement is effectively restrained. The following magnetic force generating means is added to this basic configuration.

つまり、第1図は第5図の案内機構に本発明による磁気
力発生手段を組み込んだものについて、第5図のA方向
からみた面Sの断面図である。第1図において、11〜
18は永久磁石であり、それぞれ図の矢印の方向に磁化
されている。永久磁石11と12は固定板3の下面側に
互いに逆極性になる向きで配置され、永久磁石13と1
4は可動板5の上面側に互いに逆極性になる向きで配置
され、永久磁石11と13および永久磁石12と14と
が互いの同極を対向させて配置されている。
That is, FIG. 1 is a cross-sectional view of the guide mechanism shown in FIG. 5 in which the magnetic force generating means according to the present invention is incorporated, taken from the direction A in FIG. 5. In Figure 1, 11~
18 are permanent magnets, each of which is magnetized in the direction of the arrow in the figure. Permanent magnets 11 and 12 are arranged on the lower surface side of fixed plate 3 in opposite polarity directions, and permanent magnets 13 and 1
4 are arranged on the upper surface side of the movable plate 5 with opposite polarities, and permanent magnets 11 and 13 and permanent magnets 12 and 14 are arranged with their same polarities facing each other.

同様に、永久磁石17と18は固定板4の上面側に互い
に逆極性となる向きに配置され、永久磁石15と16が
可動板5の下面側に互いに逆極性の向きで配置され、永
久磁石15と17および永久磁石16と18とが同極同
士が対向する配置になっている。なお1つは2個の永久
磁石の背面側を磁気的につなぐヨーク板である。
Similarly, permanent magnets 17 and 18 are arranged on the upper surface of the fixed plate 4 in opposite polarity directions, and permanent magnets 15 and 16 are arranged on the lower surface of the movable plate 5 in opposite polarity directions. The permanent magnets 15 and 17 and the permanent magnets 16 and 18 are arranged so that the same poles face each other. One is a yoke plate that magnetically connects the back sides of the two permanent magnets.

このような配置により可動板5の永久磁石13〜16と
固定板3の永久磁石11.12および固定板4の磁石1
7.18との間にはY方向の反発力とともにX方向の磁
気力が発生する。Y方向の磁気反発力は、固定板3と固
定板4とが連結されていれば打ち消し合って外部には作
用しない。X方向の磁気力は可動板5のX方向の中立点
からの変位にともなって次のように発生′する。
With this arrangement, the permanent magnets 13 to 16 of the movable plate 5, the permanent magnets 11 and 12 of the fixed plate 3, and the magnet 1 of the fixed plate 4
7.18, a repulsive force in the Y direction and a magnetic force in the X direction are generated. If the fixed plate 3 and fixed plate 4 are connected, the magnetic repulsion force in the Y direction cancels each other out and does not act on the outside. The magnetic force in the X direction is generated as follows as the movable plate 5 is displaced from the neutral point in the X direction.

第2図は可動板5の変位にともなうバネ復元力と永久磁
石11〜18による磁気力(X方向の力)の特性を示し
ている。バネ復元力fは、変位量Xに対してf−−kx
(kは正の定数)なる関係で発生する。一方永久磁石1
1〜18により発生するX方向の磁気力は、x−0、f
−0の近傍の所定範囲内では、バネ復元力と反対方向の
力となる。
FIG. 2 shows the characteristics of the spring restoring force accompanying the displacement of the movable plate 5 and the magnetic force (force in the X direction) caused by the permanent magnets 11 to 18. The spring restoring force f is f−-kx with respect to the displacement amount
(k is a positive constant). On the other hand, permanent magnet 1
The magnetic force in the X direction generated by 1 to 18 is x-0, f
Within a predetermined range near −0, the force is in the opposite direction to the spring restoring force.

つまりF−px (pは正の定数)となる。そして、f
−Fが可動板5をXだけ変位させるのに必要な力である
。この合成力f−Fは、定数に5pがほぼ等しくなるよ
うに構成することで、ある範囲内においてはほぼゼロに
近づけることが可能である。
In other words, it becomes F-px (p is a positive constant). And f
-F is the force required to displace the movable plate 5 by X. This resultant force f-F can be made close to zero within a certain range by configuring the constant to be approximately equal to 5p.

第3図は本発明の第2実施例の構成を示している。ここ
では可動板5の上面側に3個の永久磁石21.22.2
3の組(矢印の向きに磁化されている)を配設し、これ
と向かい合う可動板3の下面側に高透磁率材料からなる
吸引板27を取付け、吸引板27を中央の磁石22に対
向させている。
FIG. 3 shows the configuration of a second embodiment of the present invention. Here, three permanent magnets 21, 22, 2 are placed on the upper surface side of the movable plate 5.
3 (magnetized in the direction of the arrow) is arranged, and an attraction plate 27 made of a high magnetic permeability material is attached to the lower surface side of the movable plate 3 facing this, and the attraction plate 27 is opposed to the central magnet 22. I'm letting you do it.

同様に可動板5の下面側に3個の永久磁石24゜25.
26の組を取付け、これに向かい合う固定板4の上面側
に吸引板28を磁石25と対向させて取付けている。な
お2つは各磁石の組の背面側に配置したヨーク板である
。この構成では、吸引板と磁石21〜26との間には、
Y方向の吸引力と第4図に示すX方向の磁気力Fが発生
する。第4図に示すように、可動板5の変位fik x
 −0の中立点の近傍の所定範囲内においては、前述の
ようにF−pxなる磁気力が発生し、バネ復元力fを打
ち消すことができる。
Similarly, three permanent magnets 24°25.
26 are attached, and a suction plate 28 is attached to the upper surface side of the fixed plate 4 facing the magnet 25 so as to face the magnet 25. Two yoke plates are placed on the back side of each magnet set. In this configuration, between the attraction plate and the magnets 21 to 26,
An attractive force in the Y direction and a magnetic force F in the X direction shown in FIG. 4 are generated. As shown in FIG. 4, the displacement fik x of the movable plate 5
Within a predetermined range near the neutral point of -0, a magnetic force F-px is generated as described above, and can cancel out the spring restoring force f.

第1図、第3図の構成は、ともに本発明の意図する磁気
力発生手段の最小単位を示している。案内方向即ち第1
図、第3図のX方向に本発明で開示した磁気力発生手段
を複数個配置してもこれらの合成発生力で本発明の示す
磁気力と同様の効果を得ることができる。
The configurations shown in FIGS. 1 and 3 both show the minimum unit of the magnetic force generating means intended by the present invention. Guidance direction i.e. first
Even if a plurality of magnetic force generating means disclosed in the present invention are arranged in the X direction in FIGS.

(発明の効果) 以上詳細に説明したように、この発明に係る微動案内装
置では、可動体の変位にともなって発生するバネ復元力
が前記磁気力発生手段によって生じる磁気力により打ち
消され、可動体を変位させるのに必要な外部からの力が
その分だけ低減されることになる。したがって、外部に
現れる復元力を増加させずに案内方向と直交する方向の
動きや許容荷重を増加させるためにバネの厚さを増加さ
せることも可能となり、案内性能を向上させることがで
きる。
(Effects of the Invention) As explained in detail above, in the fine movement guide device according to the present invention, the spring restoring force generated with the displacement of the movable body is canceled by the magnetic force generated by the magnetic force generating means, and the movable body The external force required to displace the is reduced by that amount. Therefore, it is possible to increase the thickness of the spring in order to increase the movement or permissible load in the direction perpendicular to the guiding direction without increasing the restoring force appearing on the outside, and the guiding performance can be improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の第1実施例による微動案内機構の縦断
面図(第5図の面Sの位置での断面をA方向から見た図
)、第2図は第1図の構成の特性図、第3図は本発明の
第2実施例による微動案内機構の縦断面図、第4図は第
3図の構成の特性図、第5図は従来の微動案内機構の斜
視図である(第5図に磁気力発生手段を付加したものが
本発明の実施例である)。 1.2・・・板バネ 3.4・・・固定板 5・・・・・・・・・可動板 11〜18・・・永久磁石 1つ・・・・・・ヨーク板 21〜26・・・永久磁石 27.28・・・吸引板 29・・・・・・ヨーク板
FIG. 1 is a longitudinal cross-sectional view of the fine movement guide mechanism according to the first embodiment of the present invention (a cross section at the position of plane S in FIG. 5, viewed from direction A), and FIG. 2 is a view of the configuration of FIG. 1. FIG. 3 is a longitudinal sectional view of a fine movement guide mechanism according to a second embodiment of the present invention, FIG. 4 is a characteristic diagram of the configuration of FIG. 3, and FIG. 5 is a perspective view of a conventional fine movement guide mechanism. (An embodiment of the present invention is shown in FIG. 5 in which a magnetic force generating means is added). 1.2...Plate spring 3.4...Fixed plate 5...Movable plate 11-18...One permanent magnet...Yoke plate 21-26. ... Permanent magnet 27.28 ... Attraction plate 29 ... Yoke plate

Claims (3)

【特許請求の範囲】[Claims] (1)固定体と可動体との間にバネを介在させ、このバ
ネの弾性変形により可動体を特定の運動方向に案内する
機構において、永久磁石による磁気的吸引反発力を発生
する磁気力発生手段を前記固定体と前記可動体とにわた
って配設し、前記可動体の変位にともなう前記バネの弾
性変形による復元力と反対方向の力が前記磁気力発生手
段によって生じるように構成したことを特徴とする微動
案内機構。
(1) In a mechanism in which a spring is interposed between a fixed body and a movable body, and the elastic deformation of this spring guides the movable body in a specific direction of movement, magnetic force is generated by a permanent magnet to generate magnetic attraction and repulsion. A means is disposed between the fixed body and the movable body, and the magnetic force generating means generates a force in a direction opposite to the restoring force due to the elastic deformation of the spring as the movable body is displaced. Fine movement guide mechanism.
(2)前記磁気力発生手段は、前記可動体に配置された
永久磁石と前記固定体に配置された永久磁石とが互いに
反発するように配置されたものである請求項1記載の微
動案内機構。
(2) The fine movement guide mechanism according to claim 1, wherein the magnetic force generating means is arranged such that a permanent magnet arranged on the movable body and a permanent magnet arranged on the fixed body repel each other. .
(3)前記磁気力発生手段は、前記固定体と前記可動体
の一方に永久磁石を他方に高透磁率材料からなる吸引板
を配設したものであり、前記バネによって発生する力が
ゼロである位置の近傍の所定範囲において、前記永久磁
石と前記吸引板とによって前記バネの復元力と反対方向
の力が発生する配置関係になっていることを特徴とする
請求項1記載の微動案内機構。
(3) The magnetic force generating means has a permanent magnet disposed on one of the fixed body and the movable body and an attraction plate made of a high magnetic permeability material on the other, and the force generated by the spring is zero. 2. The fine movement guide mechanism according to claim 1, wherein the permanent magnet and the suction plate generate a force in a direction opposite to the restoring force of the spring in a predetermined range near a certain position. .
JP22171589A 1989-08-30 1989-08-30 Jogging guide mechanism Pending JPH0389038A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22171589A JPH0389038A (en) 1989-08-30 1989-08-30 Jogging guide mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22171589A JPH0389038A (en) 1989-08-30 1989-08-30 Jogging guide mechanism

Publications (1)

Publication Number Publication Date
JPH0389038A true JPH0389038A (en) 1991-04-15

Family

ID=16771133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22171589A Pending JPH0389038A (en) 1989-08-30 1989-08-30 Jogging guide mechanism

Country Status (1)

Country Link
JP (1) JPH0389038A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022077488A (en) * 2020-11-11 2022-05-23 ツィンファ ユニバーシティ Magnetic fluid damper based on principle of secondary buoyance

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022077488A (en) * 2020-11-11 2022-05-23 ツィンファ ユニバーシティ Magnetic fluid damper based on principle of secondary buoyance

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