JPH038858U - - Google Patents
Info
- Publication number
- JPH038858U JPH038858U JP6861689U JP6861689U JPH038858U JP H038858 U JPH038858 U JP H038858U JP 6861689 U JP6861689 U JP 6861689U JP 6861689 U JP6861689 U JP 6861689U JP H038858 U JPH038858 U JP H038858U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- receiving member
- locking mechanism
- slide receiving
- ion implantation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005405 multipole Effects 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 claims 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6861689U JPH038858U (nl) | 1989-06-14 | 1989-06-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6861689U JPH038858U (nl) | 1989-06-14 | 1989-06-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH038858U true JPH038858U (nl) | 1991-01-28 |
Family
ID=31603202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6861689U Pending JPH038858U (nl) | 1989-06-14 | 1989-06-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH038858U (nl) |
-
1989
- 1989-06-14 JP JP6861689U patent/JPH038858U/ja active Pending