JPH0388342U - - Google Patents

Info

Publication number
JPH0388342U
JPH0388342U JP15051389U JP15051389U JPH0388342U JP H0388342 U JPH0388342 U JP H0388342U JP 15051389 U JP15051389 U JP 15051389U JP 15051389 U JP15051389 U JP 15051389U JP H0388342 U JPH0388342 U JP H0388342U
Authority
JP
Japan
Prior art keywords
wafer
cassette
sensor
wafers
transfer robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15051389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15051389U priority Critical patent/JPH0388342U/ja
Publication of JPH0388342U publication Critical patent/JPH0388342U/ja
Pending legal-status Critical Current

Links

JP15051389U 1989-12-26 1989-12-26 Pending JPH0388342U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15051389U JPH0388342U (enrdf_load_stackoverflow) 1989-12-26 1989-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15051389U JPH0388342U (enrdf_load_stackoverflow) 1989-12-26 1989-12-26

Publications (1)

Publication Number Publication Date
JPH0388342U true JPH0388342U (enrdf_load_stackoverflow) 1991-09-10

Family

ID=31696860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15051389U Pending JPH0388342U (enrdf_load_stackoverflow) 1989-12-26 1989-12-26

Country Status (1)

Country Link
JP (1) JPH0388342U (enrdf_load_stackoverflow)

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