JPH0388334U - - Google Patents
Info
- Publication number
- JPH0388334U JPH0388334U JP14883989U JP14883989U JPH0388334U JP H0388334 U JPH0388334 U JP H0388334U JP 14883989 U JP14883989 U JP 14883989U JP 14883989 U JP14883989 U JP 14883989U JP H0388334 U JPH0388334 U JP H0388334U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- suction nozzle
- vacuum
- prevent
- vacuum piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000004020 conductor Substances 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Die Bonding (AREA)
Description
第１図は本考案の真空吸着式ピンセツトの一実
施例を示す側面図である。
１……吸着ノズル、２……パイプ、３……継手
、４……本体パイプ、６……保持部、８……真空
チユーブ、９……金属板、１０……接地線、１１
……共通接地面。
FIG. 1 is a side view showing an embodiment of the vacuum suction type tweezers of the present invention. DESCRIPTION OF SYMBOLS 1... Suction nozzle, 2... Pipe, 3... Fitting, 4... Main body pipe, 6... Holding part, 8... Vacuum tube, 9... Metal plate, 10... Ground wire, 11
...Common ground plane.
Claims (1)
着ノズルに接続する真空配管を導電性材料を用い
て形成するとともに、上記真空配管を、吸着され
る半導体装置に接地して、この半導体装置の静電
破壊を防止するようにした真空吸着式ピンセツト
。 A suction nozzle for suctioning a semiconductor device and a vacuum piping connected to this suction nozzle are formed using a conductive material, and the vacuum piping is grounded to the semiconductor device to be suctioned to prevent electrostatic damage of the semiconductor device. Vacuum adsorption type tweezers designed to prevent
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14883989U JPH0388334U (en) | 1989-12-25 | 1989-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14883989U JPH0388334U (en) | 1989-12-25 | 1989-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0388334U true JPH0388334U (en) | 1991-09-10 |
Family
ID=31695271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14883989U Pending JPH0388334U (en) | 1989-12-25 | 1989-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0388334U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008062332A (en) * | 2006-09-07 | 2008-03-21 | Matsumoto Giken:Kk | Vacuum tweezers |
-
1989
- 1989-12-25 JP JP14883989U patent/JPH0388334U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008062332A (en) * | 2006-09-07 | 2008-03-21 | Matsumoto Giken:Kk | Vacuum tweezers |