JPH0388256U - - Google Patents
Info
- Publication number
- JPH0388256U JPH0388256U JP15178389U JP15178389U JPH0388256U JP H0388256 U JPH0388256 U JP H0388256U JP 15178389 U JP15178389 U JP 15178389U JP 15178389 U JP15178389 U JP 15178389U JP H0388256 U JPH0388256 U JP H0388256U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- liner
- ion source
- flange
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15178389U JPH0388256U (de) | 1989-12-26 | 1989-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15178389U JPH0388256U (de) | 1989-12-26 | 1989-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0388256U true JPH0388256U (de) | 1991-09-10 |
Family
ID=31698069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15178389U Pending JPH0388256U (de) | 1989-12-26 | 1989-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0388256U (de) |
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1989
- 1989-12-26 JP JP15178389U patent/JPH0388256U/ja active Pending