JPH0385466U - - Google Patents
Info
- Publication number
- JPH0385466U JPH0385466U JP14643489U JP14643489U JPH0385466U JP H0385466 U JPH0385466 U JP H0385466U JP 14643489 U JP14643489 U JP 14643489U JP 14643489 U JP14643489 U JP 14643489U JP H0385466 U JPH0385466 U JP H0385466U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- opening
- thin film
- chamber
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005192 partition Methods 0.000 claims description 3
- 238000000638 solvent extraction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14643489U JPH0385466U (pt) | 1989-12-21 | 1989-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14643489U JPH0385466U (pt) | 1989-12-21 | 1989-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0385466U true JPH0385466U (pt) | 1991-08-29 |
Family
ID=31693017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14643489U Pending JPH0385466U (pt) | 1989-12-21 | 1989-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0385466U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010526446A (ja) * | 2007-05-09 | 2010-07-29 | ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | フラットな基板の処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5590438A (en) * | 1978-12-27 | 1980-07-09 | Hitachi Ltd | Plasma surface treatment device |
-
1989
- 1989-12-21 JP JP14643489U patent/JPH0385466U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5590438A (en) * | 1978-12-27 | 1980-07-09 | Hitachi Ltd | Plasma surface treatment device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010526446A (ja) * | 2007-05-09 | 2010-07-29 | ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | フラットな基板の処理装置 |