JPH038439U - - Google Patents
Info
- Publication number
- JPH038439U JPH038439U JP6763689U JP6763689U JPH038439U JP H038439 U JPH038439 U JP H038439U JP 6763689 U JP6763689 U JP 6763689U JP 6763689 U JP6763689 U JP 6763689U JP H038439 U JPH038439 U JP H038439U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- side plates
- pair
- semiconductor wafer
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6763689U JPH0810194Y2 (ja) | 1989-06-09 | 1989-06-09 | ウェーハ立替機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6763689U JPH0810194Y2 (ja) | 1989-06-09 | 1989-06-09 | ウェーハ立替機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH038439U true JPH038439U (https=) | 1991-01-28 |
| JPH0810194Y2 JPH0810194Y2 (ja) | 1996-03-27 |
Family
ID=31601378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6763689U Expired - Lifetime JPH0810194Y2 (ja) | 1989-06-09 | 1989-06-09 | ウェーハ立替機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0810194Y2 (https=) |
-
1989
- 1989-06-09 JP JP6763689U patent/JPH0810194Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0810194Y2 (ja) | 1996-03-27 |