JPH038427U - - Google Patents

Info

Publication number
JPH038427U
JPH038427U JP1989067551U JP6755189U JPH038427U JP H038427 U JPH038427 U JP H038427U JP 1989067551 U JP1989067551 U JP 1989067551U JP 6755189 U JP6755189 U JP 6755189U JP H038427 U JPH038427 U JP H038427U
Authority
JP
Japan
Prior art keywords
substrate
trapezoid
recess
height
protection plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989067551U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989067551U priority Critical patent/JPH038427U/ja
Publication of JPH038427U publication Critical patent/JPH038427U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1989067551U 1989-06-09 1989-06-09 Pending JPH038427U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989067551U JPH038427U (enExample) 1989-06-09 1989-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989067551U JPH038427U (enExample) 1989-06-09 1989-06-09

Publications (1)

Publication Number Publication Date
JPH038427U true JPH038427U (enExample) 1991-01-28

Family

ID=31601219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989067551U Pending JPH038427U (enExample) 1989-06-09 1989-06-09

Country Status (1)

Country Link
JP (1) JPH038427U (enExample)

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