JPH038426U - - Google Patents

Info

Publication number
JPH038426U
JPH038426U JP6771689U JP6771689U JPH038426U JP H038426 U JPH038426 U JP H038426U JP 6771689 U JP6771689 U JP 6771689U JP 6771689 U JP6771689 U JP 6771689U JP H038426 U JPH038426 U JP H038426U
Authority
JP
Japan
Prior art keywords
reaction tube
reaction
heater
defining
curved surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6771689U
Other languages
English (en)
Japanese (ja)
Other versions
JP2541813Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989067716U priority Critical patent/JP2541813Y2/ja
Publication of JPH038426U publication Critical patent/JPH038426U/ja
Application granted granted Critical
Publication of JP2541813Y2 publication Critical patent/JP2541813Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989067716U 1989-06-09 1989-06-09 縦型cvd装置の反応管 Expired - Lifetime JP2541813Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989067716U JP2541813Y2 (ja) 1989-06-09 1989-06-09 縦型cvd装置の反応管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989067716U JP2541813Y2 (ja) 1989-06-09 1989-06-09 縦型cvd装置の反応管

Publications (2)

Publication Number Publication Date
JPH038426U true JPH038426U (da) 1991-01-28
JP2541813Y2 JP2541813Y2 (ja) 1997-07-23

Family

ID=31601535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989067716U Expired - Lifetime JP2541813Y2 (ja) 1989-06-09 1989-06-09 縦型cvd装置の反応管

Country Status (1)

Country Link
JP (1) JP2541813Y2 (da)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62201927U (da) * 1986-06-13 1987-12-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62201927U (da) * 1986-06-13 1987-12-23

Also Published As

Publication number Publication date
JP2541813Y2 (ja) 1997-07-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term