JPH038425U - - Google Patents
Info
- Publication number
- JPH038425U JPH038425U JP6880289U JP6880289U JPH038425U JP H038425 U JPH038425 U JP H038425U JP 6880289 U JP6880289 U JP 6880289U JP 6880289 U JP6880289 U JP 6880289U JP H038425 U JPH038425 U JP H038425U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- developing device
- spinner
- attracts
- nozzles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6880289U JPH038425U (zh) | 1989-06-12 | 1989-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6880289U JPH038425U (zh) | 1989-06-12 | 1989-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH038425U true JPH038425U (zh) | 1991-01-28 |
Family
ID=31603552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6880289U Pending JPH038425U (zh) | 1989-06-12 | 1989-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH038425U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012216798A (ja) * | 2011-03-25 | 2012-11-08 | Toppan Printing Co Ltd | 現像ノズル、現像装置および現像方法 |
-
1989
- 1989-06-12 JP JP6880289U patent/JPH038425U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012216798A (ja) * | 2011-03-25 | 2012-11-08 | Toppan Printing Co Ltd | 現像ノズル、現像装置および現像方法 |