JPH0383634U - - Google Patents
Info
- Publication number
- JPH0383634U JPH0383634U JP14319189U JP14319189U JPH0383634U JP H0383634 U JPH0383634 U JP H0383634U JP 14319189 U JP14319189 U JP 14319189U JP 14319189 U JP14319189 U JP 14319189U JP H0383634 U JPH0383634 U JP H0383634U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- organometallic material
- bubbling
- container
- introduction pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000002524 organometallic group Chemical group 0.000 claims description 11
- 239000007789 gas Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 230000005587 bubbling Effects 0.000 claims description 7
- 239000012159 carrier gas Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims 1
- 229920006395 saturated elastomer Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14319189U JPH0383634U (ref) | 1989-12-12 | 1989-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14319189U JPH0383634U (ref) | 1989-12-12 | 1989-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0383634U true JPH0383634U (ref) | 1991-08-26 |
Family
ID=31689986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14319189U Pending JPH0383634U (ref) | 1989-12-12 | 1989-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0383634U (ref) |
-
1989
- 1989-12-12 JP JP14319189U patent/JPH0383634U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0383634U (ref) | ||
| JPS62166228U (ref) | ||
| JPS6251738U (ref) | ||
| JP2938461B2 (ja) | Cvd装置への液化性原料導入法 | |
| JPS62182537U (ref) | ||
| JPS61123532U (ref) | ||
| JPS5525943A (en) | Ion source device | |
| JPS6319569U (ref) | ||
| JPS63140619U (ref) | ||
| JPS62127978U (ref) | ||
| JPH0326337U (ref) | ||
| JPH01158077U (ref) | ||
| JPS6331526U (ref) | ||
| JPS61202468U (ref) | ||
| JPH0283464U (ref) | ||
| JPS6255573U (ref) | ||
| JPS5877041U (ja) | 薄膜気相成長用気化装置 | |
| JPS6365216U (ref) | ||
| JPS6331527U (ref) | ||
| JPS6151834U (ref) | ||
| JPS6275499U (ref) | ||
| JPS61175955U (ref) | ||
| JPS6227725U (ref) | ||
| JPS5841356U (ja) | 一回の使用で定量の液状物を供給する使い捨て容器 | |
| JPS62170627U (ref) |