JPH0382377A - Planely driving element and manufacture thereof - Google Patents

Abstract

PURPOSE:To facilitate manufacture of a planely driving element by providing electrodes on the side faces of individual driving actuators composed by forming a plurality of deep grooves on the surface of blocklike piezoelectric ceramics in a one-dimensional pectinated shape, and providing lead terminals in the bottoms of the grooves. CONSTITUTION:A plurality of deep grooves 1 are formed in parallel on one dimensional manner on a block B of piezoelectric ceramics. Then, electrodes 3 are formed over the driving face 6, sidewall face of a driving actuator 2, and bottoms of the grooves 1. Thereafter, excess electrodes of the face 6 are removed, fine grooves 4 are formed in the bottoms of the grooves 1, and the actuators 2 are insulated therebetween. Lead terminals 6 are inserted into the bottoms, and leads 5a, 5b are connected. Thus, a planely driving element having excellent driving performance can be easily manufactured.

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention provides a planar drive element for moving an object on a fixed drive element, or a drive element fixed to an object body, and a planar drive element for moving an object. The present invention relates to a manufacturing method thereof.

[Conventional technology]

Conventionally, this type of planar driving element has been used to micro-move card-like objects and sample stages under microscopes on a submicron order, but it has been difficult to shape the electrodes at appropriate positions. After forming a single planar driving element, the single planar driving element is arranged one-dimensionally or two-dimensionally on one base.

Furthermore, in addition to using piezoelectric elements as a configuration of the planar drive element, similar functions have been realized by a mechanical planar drive element or a collection of magnetostrictive elements.

[Problem to be solved by the invention]

Conventional planar drive elements were configured as described above, so the positioning accuracy between the assembled individual planar drive elements was not sufficient, and the driving direction was not uniform, and the characteristics between the planar drive elements were not uniform. This has caused problems such as uneven characteristics of the planar drive element, and the fact that wiring cannot be done all at once, complicating the assembly process.

The present invention solves the above-mentioned problems and provides a planar drive element that has extremely good drive performance because the performance between the individual planar drive elements is uniform and the precision of alignment is high, and its manufacture. The purpose is to provide a method.

[Means to solve the problem]

In order to achieve the above object, the planar drive element of the present invention has the following configuration and manufacturing method.

(1) A one-dimensional trench formed by forming a plurality of deep grooves in a one-dimensional comb shape on the surface of a block-shaped piezoelectric ceramic, and an electrode formed on the side surface of each individual drive actuator that constitutes this one-dimensional trench. , for driving the individual drive actuators in one dimension singly or jointly;
and a lead terminal arranged along the bottom surface of the deep groove.

(2) A two-dimensional trench formed by forming a plurality of deep grooves in a two-dimensional comb shape on the surface of a block-shaped piezoelectric ceramic, and a two-dimensional trench formed by forming a plurality of deep grooves in a two-dimensional comb shape on the surface of a block-shaped piezoelectric ceramic, and a two-dimensional trench formed by forming a plurality of deep grooves in a two-dimensional comb shape on the surface of a block-shaped piezoelectric ceramic. and lead terminals arranged in a one-dimensional comb shape along the bottom of the deep groove in order to drive the individual drive actuators two-dimensionally, singly or jointly. .

(3) A two-dimensional trench formed by forming a plurality of deep grooves in a two-dimensional comb shape on the surface of a block-shaped piezoelectric ceramic, and a side surface adjacent to all side surfaces of the individual drive actuators that make up this two-dimensional trench. In order to drive the two-dimensional trench singly or jointly, electrodes are arranged in a two-dimensional comb shape so as not to overlap each other along the bottom part of the deep groove. A planar drive element characterized by comprising a lead terminal and a lead terminal.

(4) Claims (1) to (3) characterized in that a curved flexible film is provided on the upper end surface, which is the drive surface, of the individual drive actuators constituting the one-dimensional trench and the two-dimensional trench. The planar drive element described in .

(5) forming a plurality of deep grooves in a one-dimensional comb shape on the surface of the block-shaped piezoelectric ceramic to form a one-dimensional trench; forming electrodes on the side surfaces of the individual drive actuators that constitute this one-dimensional trench; A method for manufacturing a planar drive element, characterized in that lead terminals are arranged in a one-dimensional comb shape along the bottom of the deep groove in order to drive the individual drive actuators one-dimensionally or jointly.

(6) Form a plurality of first deep grooves in a one-dimensional comb shape on the surface of the block-shaped piezoelectric ceramic to form a one-dimensional trench, and form a one-dimensional trench on the side surface of each one-dimensional individual drive actuator. After forming the electrode, a plurality of second deep grooves are formed in a one-dimensional comb shape so as to be orthogonal to the first deep groove, thereby configuring a two-dimensional individual drive actuator to form a two-dimensional trench; Manufacture of a planar drive element characterized in that lead terminals are arranged in a one-dimensional comb shape along the bottom of the first deep groove in order to drive two-dimensional individual drive actuators one-dimensionally or jointly. Method.

(7) Forming a plurality of deep grooves in a two-dimensional comb shape on the surface of a block-shaped piezoelectric ceramic to form a two-dimensional individual drive actuator, and a side surface adjacent to the front side surface of the two-dimensional individual drive actuator. In order to drive the two-dimensional individual drive actuators individually or jointly, the electrodes are formed in a two-dimensional comb shape so that they do not overlap each other along the bottom of the deep groove. A method for manufacturing a planar drive element, characterized by disposing lead terminals.

(8) A flat surface according to any one of claims (5) to (7), characterized in that a curved flexible film is formed on the upper end surface portion which is the drive surface of the one-dimensional and two-dimensional individual drive actuators. A method for manufacturing a driving element.

Therefore, the present invention differs from the conventional technology in that a planar drive element capable of one-dimensional or two-dimensional drive is realized by using block-shaped piezoelectric ceramics having uniform characteristics and subjecting the block-shaped piezoelectric ceramics to pattern processing.

[Effect]

In a one-dimensional drive planar drive element, if the drive direction is set to X, it can be driven by an X address method. That is, when a voltage is applied to an arbitrary electrode via a lead terminal by an X-scanning signal generator, a displacement amount of each drive actuator is obtained that is proportional to this voltage. Therefore, when an object is placed on the drive surface of an individual drive actuator, by sequentially applying voltage to adjacent electrodes,
The individual drive actuators are sequentially displaced to move the object in the X direction.

In addition, in a two-dimensional drive planar drive element, the drive directions are X and Y, and an XY addressing method is used, that is, any individual drive actuator in the XY matrix is selected, and an X or Y scanning signal generator is used. A voltage is applied to the electrodes through the lead terminals to drive the individual drive actuators in X and Y directions.

〔Example〕

FIG. 1 is a schematic perspective view of a one-dimensional drive planar drive element showing a first embodiment of the present invention, in which numeral 1 indicates a plurality of deep grooves formed in a one-dimensional comb shape on the surface of a block made of piezoelectric ceramics. , 2 is an individual drive actuator constituted by this deep groove 1, 3 is an electrode formed on the side wall surface of this individual drive actuator 2, and 4 is for separating this electrode 3 between the individual drive actuators 2. a microgroove formed approximately along the center of the bottom surface of the deep groove 1;
Reference numeral 5 denotes a lead terminal disposed on the bottom surface of the deep groove 1, and its contacts 5a and 5b are in contact with the respective electrodes. 6
is the drive surface of the individual drive actuator 2.

A method of driving the one-dimensional drive planar drive element configured as described above will be described. If the driving direction is set to X as shown by the arrow in FIG. 1, driving can be performed using the X address method. That is, the X-scanning signal generator (not shown)
When a voltage is applied to any electrode 3 via the lead terminal 5 (not shown), a displacement amount of the individual drive actuator 2 is obtained that is proportional to this voltage. Therefore, when an object is placed on the drive surface 6, by sequentially applying voltages to adjacent electrodes 3, it is possible to sequentially displace the individual drive actuators 2 and move the object in the X direction.

FIG. 2 is a diagram for explaining the process of manufacturing the one-dimensional driving planar drive element shown in FIG. 1.

That is, in the first step (1), a block B made of a piezoelectric material with excellent planar accuracy and surface accuracy is prepared.

In the second step (2), on the surface of this block B,
Guising tools with diamond or grindstone as the cutting edge
A plurality of deep grooves 1 are machined at regular intervals in a one-dimensional comb shape by or using electric discharge machining, thereby forming a one-dimensional trench T consisting of a plurality of individual drive actuators 2.

In the third step (3), the electrode 3 is formed over the drive surface 6 and side wall surfaces of the individual drive actuators 2 and the bottom surface of the deep groove 1 by a vapor deposition method, a sputtering method, an ECR plasma method, an electroless plating method, or the like. .

In the fourth step (4), excess electrodes present on the drive surfaces 6 of the individual drive actuators 2 are removed.

In the fifth step (5), in order to electrically isolate the individual drive actuators 2, a microgroove is formed along approximately the center of the bottom of the deep groove 1 in the same manner as in the second step (2). form 4. The width of this minute width 4 does not need to be the same as the width of the deep groove 1 originally formed, and it is sufficient to form a groove with an even smaller width and depth.

In the sixth step (6), the lead terminal 5 is inserted into the bottom of the deep groove 1 and fixed. In this case, if the solder 7 is thinly formed on the surfaces of the contacts 5a and 5b of the lead terminal 5,
Uniform fixation is possible with a slight heating operation.

Furthermore, a specific manufacturing example will be explained. A 5cm square cube-shaped PZT ceramic block with excellent planar and surface accuracy was prepared, and deep grooves 4cm deep and 1mm wide were formed into a one-dimensional comb shape at 51m pitches using a guising tool on its surface. Form. After chemical etching is performed to remove processing distortion, electroless NiP plating is performed to form a metal film as an electrode 3 over the drive surface 6 and side wall surfaces of the individual drive actuators 2 and the bottom of the deep groove 1. Next, after removing the excess metal film present on the driving surface 6 and the end face of the ceramic block by grinding or polishing, a width of 0.0 mm is formed along the substantially center portion of the bottom surface of the deep groove 1. 511,
A microscopic gap 4 of depth laam is formed to separate the electrodes 3 between the individual drive actuators 2.

Further, the lead terminal 5 is inserted into the bottom of the deep groove 1 and fixed. In this way, we were able to form a one-dimensional driving planar drive element and confirm its operation.

FIG. 3 is a schematic perspective view of a one-dimensional drive planar drive element capable of individually operating, showing a second embodiment of the present invention, in which individual drive actuators 2 are arranged in a two-dimensional comb shape. . Here, reference numeral 9 denotes an individual deep groove 8 and a second deep groove 8' each independently formed in a two-dimensional comb shape so as to be orthogonal to each other on the surface of the piezoelectric ceramic block. It is a drive actuator.

In this case, the electrode 3 is formed on the side wall surface in one direction of the individual drive actuator 9, here, on the side wall surface facing the first deep groove 8, and is located approximately at the center of the bottom surface of the first deep groove 8. They are electrically separated by a micro groove 4 formed along the first deep groove 8 , and the lead terminal 5 is disposed at the bottom of the first deep groove 8 .

A method of driving the one-dimensional planar driving element configured as described above and capable of being driven individually will be described.

As shown in FIG. 3, if the driving direction is X and the driving direction perpendicular to X is Y, driving can be performed using the XY addressing method. That is, by selecting any individual drive actuator 9 in the X, Y matrix and applying a voltage to the electrode 3 via the lead terminal 5 by an X scanning signal generator (not shown), the individual drive actuator 9 is activated. drive

Next, a method for manufacturing the individually drivable one-dimensional planar drive element shown in FIG. 3 will be described below as a specific manufacturing example.

First, a PZT piezoelectric ceramic block having a 5C1 square cubic shape with excellent planar precision and surface precision is prepared, and a plurality of first deep grooves 8 are formed one-dimensionally to a depth of 4 in the same manner as shown in FIG.
The electrodes 3 are formed and unnecessary electrodes are removed. Next, a plurality of second deep grooves 8' are formed in the same manner at right angles to the already formed first deep grooves 8 with a depth of 4cI11, a width of 1mm, and a pitch interval of 5III.
By forming the drive actuator 9, the individual drive actuator 9 is constructed.

Furthermore, by forming a minute groove 4 for electrode separation on the bottom surface of the first deep groove 8 and installing lead terminals 5 along this bottom surface, a one-dimensional drive plane with individual drive actuators 9 is possible. Manufacture the drive element.

In this way, we confirmed that it is possible to partially control the amount of drive using one-dimensional planar drive elements that can be driven individually.

FIG. 4 is a schematic perspective view of an integrated two-dimensional drive planar drive element that can be operated individually, showing a third embodiment of the present invention. In this case, the difference from the second embodiment shown in FIG.
4(b) and (C) in order to electrically separate each individual drive actuator 9.
As shown in FIG. 2, electrode separation grooves 11 are formed in the four corners of each drive actuator 9, extending all the way to the bottom of the deep grooves IQ and 10'. Further, a micro groove 4 is formed along the approximate center of the bottom surface of the deep groove 10.10', and a micro groove 4 is formed along the bottom surface of the deep groove 10. A plurality of lead terminals 5 are arranged.

The integrated two-dimensional drive planar drive element configured as described above can be driven using an XY addressing method with the drive directions set to X and Y. That is, select any individual drive actuator in the XY matrix, apply a voltage to the electrode 3 via the lead terminal 5 by an X or Y scanning signal generator (not shown), and move the individual drive actuator in the X and Y directions. drive it.

Next, a method for manufacturing the integrated two-dimensional drive planar drive element capable of individually operating as shown in FIGS. 4(a), (b), and (c) will be described below as a specific manufacturing example.

First, we will introduce a PZT piezovoltaic ceramic block with excellent planar and surface precision of a 5C11 square cube, and a radius 1
The deep grooves 10 and 10' of the cabinet are formed in a cross shape in the X direction and the Y direction with a depth of 4C1 and a pitch interval of 5M so that they are perpendicular to each other, thereby forming individual drive actuators 9. After removing processing strain, the electrode 3 is formed and unnecessary electrodes are removed. Then deep grooves 10.10' in the X and Y directions
1 at the cross point. Grinding is performed using a 2 mmΦ drill to form electrode separation grooves 11 as shown in FIG.
are formed in a cross shape across the X and Y directions to separate the electrodes 3 in the X and Y directions. Also, X
By installing the lead terminals 5 along the bottom of the deep groove in the direction and the Y direction so as not to overlap each other, an integrated two-dimensional drive planar drive element that can be driven individually in the X direction and the Y direction is manufactured. .

Here, a grinding process using a drill was employed to form the electrode separation grooves 11, but the electrode separation grooves 11 can also be formed by the following method. That is, 1. Deep groove 10.
After processing with the width of 10' increased to 4 m, processing strain is removed, electrodes 3 are formed, and unnecessary electrodes are removed. Next, as shown in FIG. 4(c), electrode separation grooves 11 are formed in the four corners of each drive actuator 9 diagonally at an angle of 45 degrees by means of guiding tools up to the bottoms of the deep grooves 10 and 10'. 10. A small groove 4 is formed along approximately the center of the bottom portion of 10' to separate the electrodes in the X and Y directions. Further, a plurality of lead terminals 5 are installed at the bottom of the deep groove 10° 10' so as not to overlap each other.

It was confirmed that the drive amount could be partially controlled using the integral two-dimensional drive planar drive element that could be driven individually.

FIG. 5 is a diagram for explaining the fourth embodiment of the present invention, in which the drive surface 6 of each individual drive actuator 2.9 of the planar drive element shown in the first to third embodiments has a curved surface. 3 shows a partial configuration diagram in which a shaped flexible film 12 is formed.

The method of driving the planar drive element having such a configuration is the same as in the first to third embodiments, except that a curved flexible film 12 is formed on the drive surface 6 of the individual drive actuator 2°9. By doing so, the following new effects will occur.

■: Due to the increase in frictional force, the individual drive actuator 2
, 9 on the drive surface 6, and also prevents damage caused by slipping.

(2): By controlling the surface shape of the curved flexible membrane 12, the contact area of the object can be freely controlled.

■: The curved flexible membrane 12 is an individual drive actuator 2
, 9, the surface of the drive surface 6 of the individual drive actuator 2.9 is worn out, the electrodes are damaged,
It is possible to improve the life of the planar drive element itself without causing electrical short circuits.

FIG. 6 shows a method for forming such a curved flexible membrane 12 on the drive surfaces 6 of the individual drive actuators 2, 9.

First, in a first step (1), a planar drive element 13 and an acrylic or epoxy photopolymer 14 are prepared.

In the second step (2), the tip portion of the planar drive element 13, that is, the drive surface 6, is dipped into the photopolymer 14.

In the third step (3), the dipped photopolymer 14 is irradiated with ultraviolet rays 16 using an ultraviolet irradiation device 15 to be cured. In this case, if a photopolymer 14 with a low viscosity is used, a thin and relatively uniform polymer film can be formed as the curved flexible film 12 on the surface of the planar drive element 13, and if a photopolymer 14 with a high viscosity is used, a relatively A thick and steep polymer film can be formed as the curved flexible film 12. Furthermore, by adjusting the structure of the raw material of the photopolymer 14 and the type of crosslinking agent, it is also possible to control the surface hardness of the curved flexible film 12.

The curved flexible membrane 12 is made of such a photopolymer 14.
Apart from the dipping method described above, the following method can also be used.

(1) First, the planar drive element 13 is prepared.

(2) Set the planar drive element 13 in a vacuum device.

(3) A raw material gas such as methane, ethane, or ethylene is introduced into this vacuum device, and an electric field is applied between opposing electrodes to generate plasma, and this plasma polymerizes the raw material gas to drive the planar drive. It is deposited on the surface of the element 13 to form a curved flexible film 12.

[Effects of the Invention] As explained above, the planar drive element of the present invention is capable of one-dimensional drive or two-dimensional drive, and the performance of each individual drive actuator is uniform, so the drive performance is improved. This has the effect of easily realizing a high-quality planar drive element. Furthermore, by forming a highly flexible curved structure on the surface of the planar drive element, there is also the effect that a planar drive element with high handling performance can be easily realized.

[BRIEF DESCRIPTION OF THE DRAWINGS] Fig. 1 is a perspective view showing a one-dimensional drive planar drive element according to a first embodiment of the present invention, and Fig. 2 explains the manufacturing process of this one-dimensional drive planar drive element. FIG. 3 is a perspective view showing a one-dimensional planar drive element that can be individually driven, and FIG. 4 is a third embodiment of the invention.
FIG. 5 is a perspective view showing an integral two-dimensional drive planar drive element that can be driven individually. FIG. FIG. 6 is a partial configuration diagram of a planar drive element on which a film is formed, and is a diagram for explaining a method of forming a curved flexible film on the drive surface of an individual drive actuator. 1.8.8', 10.10'...deep groove, 2.9...
Individual drive actuator, 3... Electrode, 4... Micro groove, 5... Lead terminal, 6... Drive surface, 11... Electrode separation groove, 12... Curved flexible membrane, 13... Planar drive element, 14... Photopolymer 15... Ultraviolet irradiation device, 16... Ultraviolet rays, B... Block, T... One-dimensional trench. Figure 1 Figure 4 (a) Figure 4 (1)) Figure 4 (c) Figure 5

Claims (8)

[Claims] (1) A one-dimensional trench formed by forming a plurality of deep grooves in a one-dimensional comb shape on the surface of a block-shaped piezoelectric ceramic, and an electrode formed on the side surface of each individual drive actuator that constitutes this one-dimensional trench. and a lead terminal arranged along the bottom surface of the deep groove to drive the individual drive actuators one-dimensionally or jointly. (2) A two-dimensional trench formed by forming a plurality of two-dimensional comb-shaped deep grooves on the surface of a block-shaped piezoelectric ceramic, and a two-dimensional trench formed on one side of each drive actuator that constitutes this two-dimensional trench. A planar drive element comprising an electrode and lead terminals arranged in a one-dimensional comb shape along the bottom of the deep groove to drive the individual drive actuators two-dimensionally, singly or jointly. (3) A two-dimensional trench formed by forming a plurality of deep grooves in a two-dimensional comb shape on the surface of a block-shaped piezoelectric ceramic, and a side surface adjacent to all side surfaces of the individual drive actuators that constitute this two-dimensional trench. electrodes formed so as not to be electrically conductive; and leads arranged in a two-dimensional comb shape along the bottom of the deep groove so as not to overlap with each other in order to drive the two-dimensional trench individually or jointly. A planar drive element characterized by comprising a terminal. (4) Claims (1) to (3) characterized in that a curved flexible film is provided on the upper end surface, which is the drive surface, of the individual drive actuators constituting the one-dimensional trench and the two-dimensional trench. The planar drive element described in . (5) Forming a plurality of deep grooves in a one-dimensional comb shape on the surface of the block-shaped piezoelectric ceramic to form a one-dimensional trench, forming electrodes on the side surfaces of the individual drive actuators constituting the one-dimensional trench, and A method for manufacturing a planar drive element, characterized in that lead terminals are arranged in a one-dimensional comb shape along the bottom of the deep groove in order to drive the drive actuators one-dimensionally or together. (6) A plurality of first deep grooves are formed in a one-dimensional comb shape on the surface of the block-shaped piezoelectric ceramic to form a one-dimensional trench, and electrodes are attached to the side surfaces of the one-dimensional individual drive actuators that make up this one-dimensional trench. After forming a plurality of second deep grooves in a one-dimensional comb shape so as to be perpendicular to the first deep grooves, a two-dimensional individual drive actuator is configured as a two-dimensional trench; A method for manufacturing a planar drive element, characterized in that lead terminals are arranged in a one-dimensional comb shape along the bottom surface of the first deep groove in order to drive individual drive actuators in one dimension alone or together. . (7) A plurality of deep grooves are formed in a two-dimensional comb shape on the surface of a block-shaped piezoelectric ceramic to form a two-dimensional individual drive actuator, and the side surface adjacent to the front side surface of this two-dimensional individual drive actuator is In order to form electrodes so as not to be electrically conductive, and to drive the two-dimensional individual drive actuators individually or jointly, lead terminals are arranged in a two-dimensional comb shape along the bottom of the deep groove so as not to overlap each other. 1. A method of manufacturing a planar drive element, characterized by arranging. (8) A flat surface according to any one of claims (5) to (7), characterized in that a curved flexible film is formed on the upper end surface portion which is the drive surface of the one-dimensional and two-dimensional individual drive actuators. A method for manufacturing a driving element.