JPH0381638U - - Google Patents

Info

Publication number
JPH0381638U
JPH0381638U JP14331289U JP14331289U JPH0381638U JP H0381638 U JPH0381638 U JP H0381638U JP 14331289 U JP14331289 U JP 14331289U JP 14331289 U JP14331289 U JP 14331289U JP H0381638 U JPH0381638 U JP H0381638U
Authority
JP
Japan
Prior art keywords
suction cup
semiconductor wafer
cut semiconductor
cut
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14331289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525243Y2 (US20070167544A1-20070719-C00007.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14331289U priority Critical patent/JPH0525243Y2/ja
Publication of JPH0381638U publication Critical patent/JPH0381638U/ja
Application granted granted Critical
Publication of JPH0525243Y2 publication Critical patent/JPH0525243Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP14331289U 1989-12-11 1989-12-11 Expired - Lifetime JPH0525243Y2 (US20070167544A1-20070719-C00007.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14331289U JPH0525243Y2 (US20070167544A1-20070719-C00007.png) 1989-12-11 1989-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14331289U JPH0525243Y2 (US20070167544A1-20070719-C00007.png) 1989-12-11 1989-12-11

Publications (2)

Publication Number Publication Date
JPH0381638U true JPH0381638U (US20070167544A1-20070719-C00007.png) 1991-08-21
JPH0525243Y2 JPH0525243Y2 (US20070167544A1-20070719-C00007.png) 1993-06-25

Family

ID=31690089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14331289U Expired - Lifetime JPH0525243Y2 (US20070167544A1-20070719-C00007.png) 1989-12-11 1989-12-11

Country Status (1)

Country Link
JP (1) JPH0525243Y2 (US20070167544A1-20070719-C00007.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015013353A (ja) * 2013-07-08 2015-01-22 浜井産業株式会社 ワーク剥離装置および剥離方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006216891A (ja) * 2005-02-07 2006-08-17 Tokyo Univ Of Agriculture & Technology 薄膜素子構造の作製方法、及び薄膜素子構造作製用の機能性基体

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015013353A (ja) * 2013-07-08 2015-01-22 浜井産業株式会社 ワーク剥離装置および剥離方法

Also Published As

Publication number Publication date
JPH0525243Y2 (US20070167544A1-20070719-C00007.png) 1993-06-25

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