JPH0381360U - - Google Patents

Info

Publication number
JPH0381360U
JPH0381360U JP14068889U JP14068889U JPH0381360U JP H0381360 U JPH0381360 U JP H0381360U JP 14068889 U JP14068889 U JP 14068889U JP 14068889 U JP14068889 U JP 14068889U JP H0381360 U JPH0381360 U JP H0381360U
Authority
JP
Japan
Prior art keywords
processing chamber
plasma
processing
reduced pressure
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14068889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14068889U priority Critical patent/JPH0381360U/ja
Publication of JPH0381360U publication Critical patent/JPH0381360U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP14068889U 1989-12-06 1989-12-06 Pending JPH0381360U (US20100223739A1-20100909-C00025.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14068889U JPH0381360U (US20100223739A1-20100909-C00025.png) 1989-12-06 1989-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14068889U JPH0381360U (US20100223739A1-20100909-C00025.png) 1989-12-06 1989-12-06

Publications (1)

Publication Number Publication Date
JPH0381360U true JPH0381360U (US20100223739A1-20100909-C00025.png) 1991-08-20

Family

ID=31687640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14068889U Pending JPH0381360U (US20100223739A1-20100909-C00025.png) 1989-12-06 1989-12-06

Country Status (1)

Country Link
JP (1) JPH0381360U (US20100223739A1-20100909-C00025.png)

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