JPH0381358U - - Google Patents

Info

Publication number
JPH0381358U
JPH0381358U JP14388589U JP14388589U JPH0381358U JP H0381358 U JPH0381358 U JP H0381358U JP 14388589 U JP14388589 U JP 14388589U JP 14388589 U JP14388589 U JP 14388589U JP H0381358 U JPH0381358 U JP H0381358U
Authority
JP
Japan
Prior art keywords
flow rate
gas flow
output
circuit
control circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14388589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14388589U priority Critical patent/JPH0381358U/ja
Publication of JPH0381358U publication Critical patent/JPH0381358U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14388589U 1989-12-12 1989-12-12 Pending JPH0381358U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14388589U JPH0381358U (enrdf_load_stackoverflow) 1989-12-12 1989-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14388589U JPH0381358U (enrdf_load_stackoverflow) 1989-12-12 1989-12-12

Publications (1)

Publication Number Publication Date
JPH0381358U true JPH0381358U (enrdf_load_stackoverflow) 1991-08-20

Family

ID=31690636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14388589U Pending JPH0381358U (enrdf_load_stackoverflow) 1989-12-12 1989-12-12

Country Status (1)

Country Link
JP (1) JPH0381358U (enrdf_load_stackoverflow)

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