JPH0381358U - - Google Patents
Info
- Publication number
- JPH0381358U JPH0381358U JP14388589U JP14388589U JPH0381358U JP H0381358 U JPH0381358 U JP H0381358U JP 14388589 U JP14388589 U JP 14388589U JP 14388589 U JP14388589 U JP 14388589U JP H0381358 U JPH0381358 U JP H0381358U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- gas flow
- output
- circuit
- control circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003321 amplification Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14388589U JPH0381358U (cs) | 1989-12-12 | 1989-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14388589U JPH0381358U (cs) | 1989-12-12 | 1989-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0381358U true JPH0381358U (cs) | 1991-08-20 |
Family
ID=31690636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14388589U Pending JPH0381358U (cs) | 1989-12-12 | 1989-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0381358U (cs) |
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1989
- 1989-12-12 JP JP14388589U patent/JPH0381358U/ja active Pending