JPH0380291U - - Google Patents
Info
- Publication number
- JPH0380291U JPH0380291U JP14183289U JP14183289U JPH0380291U JP H0380291 U JPH0380291 U JP H0380291U JP 14183289 U JP14183289 U JP 14183289U JP 14183289 U JP14183289 U JP 14183289U JP H0380291 U JPH0380291 U JP H0380291U
- Authority
- JP
- Japan
- Prior art keywords
- matsuful
- exhaust port
- forced exhaust
- thick film
- opens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010304 firing Methods 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Tunnel Furnaces (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
第１図は、この考案の一実施例に係る厚膜焼成
炉の要部断面図、第２図は、同厚膜焼成炉の第１
図中−線における断面図、第３図は、同厚膜
焼成炉の全体構成を説明する図、第４図は、従来
の厚膜焼成炉の要部断面図、第５図は、従来の厚
膜焼成炉の温度プロフアイルを説明する図である
。
２……マツフル、２ｃ……マツフル底面、５…
…強制排気口、７……遠赤外線ヒータ、８……基
板、１０……ベルト。
FIG. 1 is a cross-sectional view of the main parts of a thick film firing furnace according to an embodiment of this invention, and FIG. 2 is a first sectional view of the thick film firing furnace.
3 is a diagram illustrating the overall configuration of the thick film firing furnace, FIG. 4 is a sectional view of the main part of a conventional thick film firing furnace, and FIG. 5 is a sectional view taken along the line - It is a figure explaining the temperature profile of a thick film firing furnace. 2...Matsuful, 2c...Matsuful bottom, 5...
... Forced exhaust port, 7... Far infrared heater, 8... Board, 10... Belt.
Claims (1)
ヒータと、前記マツフル底面上をすべりこのマツ
フル内で基板を搬送するベルトと、前記マツフル
内に開口し、マツフル内のバーンアウトガスを強
制的に排出する強制排気口とを備えてなる厚膜焼
成炉において、 前記強制排気口は、マツフル底面に開口するこ
とを特徴とする厚膜焼成炉。[Claims for Utility Model Registration] A Matsuful, a heater that heats the Matsuful from the outside, a belt that slides on the bottom surface of the Matsuful and conveys a substrate within the Matsuful, and a burner that opens in the Matsuful and that is installed inside the Matsuful. 1. A thick film firing furnace comprising a forced exhaust port for forcibly discharging outgas, wherein the forced exhaust port opens at the bottom of the matsufuru.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14183289U JPH074469Y2 (en) | 1989-12-07 | 1989-12-07 | Thick film firing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14183289U JPH074469Y2 (en) | 1989-12-07 | 1989-12-07 | Thick film firing furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0380291U true JPH0380291U (en) | 1991-08-16 |
| JPH074469Y2 JPH074469Y2 (en) | 1995-02-01 |
Family
ID=31688693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14183289U Expired - Fee Related JPH074469Y2 (en) | 1989-12-07 | 1989-12-07 | Thick film firing furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH074469Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012067977A (en) * | 2010-09-24 | 2012-04-05 | Mitsubishi Rayon Co Ltd | Exhaust gas combustion device of baking furnace |
-
1989
- 1989-12-07 JP JP14183289U patent/JPH074469Y2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012067977A (en) * | 2010-09-24 | 2012-04-05 | Mitsubishi Rayon Co Ltd | Exhaust gas combustion device of baking furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH074469Y2 (en) | 1995-02-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |