JPH0379839U - - Google Patents
Info
- Publication number
- JPH0379839U JPH0379839U JP13880889U JP13880889U JPH0379839U JP H0379839 U JPH0379839 U JP H0379839U JP 13880889 U JP13880889 U JP 13880889U JP 13880889 U JP13880889 U JP 13880889U JP H0379839 U JPH0379839 U JP H0379839U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- cleanliness
- room
- prober
- floor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13880889U JPH0735392Y2 (ja) | 1989-11-30 | 1989-11-30 | 半導体の製造設備 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13880889U JPH0735392Y2 (ja) | 1989-11-30 | 1989-11-30 | 半導体の製造設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0379839U true JPH0379839U (de) | 1991-08-15 |
JPH0735392Y2 JPH0735392Y2 (ja) | 1995-08-09 |
Family
ID=31685886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13880889U Expired - Fee Related JPH0735392Y2 (ja) | 1989-11-30 | 1989-11-30 | 半導体の製造設備 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0735392Y2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014001022A1 (de) * | 2014-01-27 | 2015-07-30 | Liebherr-Transportation Systems Gmbh & Co. Kg | Fahrzeugkühlkreislauf |
-
1989
- 1989-11-30 JP JP13880889U patent/JPH0735392Y2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014001022A1 (de) * | 2014-01-27 | 2015-07-30 | Liebherr-Transportation Systems Gmbh & Co. Kg | Fahrzeugkühlkreislauf |
Also Published As
Publication number | Publication date |
---|---|
JPH0735392Y2 (ja) | 1995-08-09 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |