JPH0379420U - - Google Patents

Info

Publication number
JPH0379420U
JPH0379420U JP13867189U JP13867189U JPH0379420U JP H0379420 U JPH0379420 U JP H0379420U JP 13867189 U JP13867189 U JP 13867189U JP 13867189 U JP13867189 U JP 13867189U JP H0379420 U JPH0379420 U JP H0379420U
Authority
JP
Japan
Prior art keywords
plasma
magnetic field
sample
generating section
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13867189U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521874Y2 (US20100056889A1-20100304-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989138671U priority Critical patent/JPH0521874Y2/ja
Publication of JPH0379420U publication Critical patent/JPH0379420U/ja
Application granted granted Critical
Publication of JPH0521874Y2 publication Critical patent/JPH0521874Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Drying Of Semiconductors (AREA)
JP1989138671U 1989-12-01 1989-12-01 Expired - Lifetime JPH0521874Y2 (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989138671U JPH0521874Y2 (US20100056889A1-20100304-C00004.png) 1989-12-01 1989-12-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989138671U JPH0521874Y2 (US20100056889A1-20100304-C00004.png) 1989-12-01 1989-12-01

Publications (2)

Publication Number Publication Date
JPH0379420U true JPH0379420U (US20100056889A1-20100304-C00004.png) 1991-08-13
JPH0521874Y2 JPH0521874Y2 (US20100056889A1-20100304-C00004.png) 1993-06-04

Family

ID=31685755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989138671U Expired - Lifetime JPH0521874Y2 (US20100056889A1-20100304-C00004.png) 1989-12-01 1989-12-01

Country Status (1)

Country Link
JP (1) JPH0521874Y2 (US20100056889A1-20100304-C00004.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63283018A (ja) * 1986-12-29 1988-11-18 Sumitomo Metal Ind Ltd プラズマ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63283018A (ja) * 1986-12-29 1988-11-18 Sumitomo Metal Ind Ltd プラズマ装置

Also Published As

Publication number Publication date
JPH0521874Y2 (US20100056889A1-20100304-C00004.png) 1993-06-04

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