JPH0379195U - - Google Patents
Info
- Publication number
- JPH0379195U JPH0379195U JP14072089U JP14072089U JPH0379195U JP H0379195 U JPH0379195 U JP H0379195U JP 14072089 U JP14072089 U JP 14072089U JP 14072089 U JP14072089 U JP 14072089U JP H0379195 U JPH0379195 U JP H0379195U
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- film
- thin film
- tantalum pentoxide
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical group [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 2
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims 2
- 230000002950 deficient Effects 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14072089U JPH0379195U (ko) | 1989-12-06 | 1989-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14072089U JPH0379195U (ko) | 1989-12-06 | 1989-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0379195U true JPH0379195U (ko) | 1991-08-12 |
Family
ID=31687670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14072089U Pending JPH0379195U (ko) | 1989-12-06 | 1989-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0379195U (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62232894A (ja) * | 1986-04-01 | 1987-10-13 | 株式会社小松製作所 | 絶縁膜 |
-
1989
- 1989-12-06 JP JP14072089U patent/JPH0379195U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62232894A (ja) * | 1986-04-01 | 1987-10-13 | 株式会社小松製作所 | 絶縁膜 |