JPH0377434U - - Google Patents

Info

Publication number
JPH0377434U
JPH0377434U JP13804089U JP13804089U JPH0377434U JP H0377434 U JPH0377434 U JP H0377434U JP 13804089 U JP13804089 U JP 13804089U JP 13804089 U JP13804089 U JP 13804089U JP H0377434 U JPH0377434 U JP H0377434U
Authority
JP
Japan
Prior art keywords
generation chamber
plasma generation
plasma
small
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13804089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521873Y2 (US20100012521A1-20100121-C00001.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13804089U priority Critical patent/JPH0521873Y2/ja
Publication of JPH0377434U publication Critical patent/JPH0377434U/ja
Application granted granted Critical
Publication of JPH0521873Y2 publication Critical patent/JPH0521873Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Drying Of Semiconductors (AREA)
JP13804089U 1989-11-30 1989-11-30 Expired - Lifetime JPH0521873Y2 (US20100012521A1-20100121-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13804089U JPH0521873Y2 (US20100012521A1-20100121-C00001.png) 1989-11-30 1989-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13804089U JPH0521873Y2 (US20100012521A1-20100121-C00001.png) 1989-11-30 1989-11-30

Publications (2)

Publication Number Publication Date
JPH0377434U true JPH0377434U (US20100012521A1-20100121-C00001.png) 1991-08-05
JPH0521873Y2 JPH0521873Y2 (US20100012521A1-20100121-C00001.png) 1993-06-04

Family

ID=31685170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13804089U Expired - Lifetime JPH0521873Y2 (US20100012521A1-20100121-C00001.png) 1989-11-30 1989-11-30

Country Status (1)

Country Link
JP (1) JPH0521873Y2 (US20100012521A1-20100121-C00001.png)

Also Published As

Publication number Publication date
JPH0521873Y2 (US20100012521A1-20100121-C00001.png) 1993-06-04

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