JPH0376144U - - Google Patents
Info
- Publication number
- JPH0376144U JPH0376144U JP13688389U JP13688389U JPH0376144U JP H0376144 U JPH0376144 U JP H0376144U JP 13688389 U JP13688389 U JP 13688389U JP 13688389 U JP13688389 U JP 13688389U JP H0376144 U JPH0376144 U JP H0376144U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- polygon mirror
- laser
- reflects
- position sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13688389U JPH0376144U (fr) | 1989-11-28 | 1989-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13688389U JPH0376144U (fr) | 1989-11-28 | 1989-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0376144U true JPH0376144U (fr) | 1991-07-30 |
Family
ID=31684068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13688389U Pending JPH0376144U (fr) | 1989-11-28 | 1989-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0376144U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014077676A (ja) * | 2012-10-10 | 2014-05-01 | Harmonic Drive Syst Ind Co Ltd | 有限角センサ |
| JP2017102272A (ja) * | 2015-12-02 | 2017-06-08 | 株式会社ニコン | ビーム走査装置、ビーム走査方法、およびパターン描画装置 |
-
1989
- 1989-11-28 JP JP13688389U patent/JPH0376144U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014077676A (ja) * | 2012-10-10 | 2014-05-01 | Harmonic Drive Syst Ind Co Ltd | 有限角センサ |
| JP2017102272A (ja) * | 2015-12-02 | 2017-06-08 | 株式会社ニコン | ビーム走査装置、ビーム走査方法、およびパターン描画装置 |