JPH0375831U - - Google Patents
Info
- Publication number
- JPH0375831U JPH0375831U JP8774289U JP8774289U JPH0375831U JP H0375831 U JPH0375831 U JP H0375831U JP 8774289 U JP8774289 U JP 8774289U JP 8774289 U JP8774289 U JP 8774289U JP H0375831 U JPH0375831 U JP H0375831U
- Authority
- JP
- Japan
- Prior art keywords
- recess
- flange
- vacuum device
- airtight
- circumferential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8774289U JPH0375831U (fi) | 1989-07-25 | 1989-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8774289U JPH0375831U (fi) | 1989-07-25 | 1989-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0375831U true JPH0375831U (fi) | 1991-07-30 |
Family
ID=31637383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8774289U Pending JPH0375831U (fi) | 1989-07-25 | 1989-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0375831U (fi) |
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1989
- 1989-07-25 JP JP8774289U patent/JPH0375831U/ja active Pending