JPH0374658U - - Google Patents
Info
- Publication number
- JPH0374658U JPH0374658U JP13556389U JP13556389U JPH0374658U JP H0374658 U JPH0374658 U JP H0374658U JP 13556389 U JP13556389 U JP 13556389U JP 13556389 U JP13556389 U JP 13556389U JP H0374658 U JPH0374658 U JP H0374658U
- Authority
- JP
- Japan
- Prior art keywords
- buttful
- exhaust passage
- cryopump
- hook
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13556389U JPH0374658U (cs) | 1989-11-22 | 1989-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13556389U JPH0374658U (cs) | 1989-11-22 | 1989-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0374658U true JPH0374658U (cs) | 1991-07-26 |
Family
ID=31682825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13556389U Pending JPH0374658U (cs) | 1989-11-22 | 1989-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0374658U (cs) |
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1989
- 1989-11-22 JP JP13556389U patent/JPH0374658U/ja active Pending