JPH0373752U

JPH0373752U -

Info

Publication number: JPH0373752U
Application number: JP11789290U
Authority: JP
Priority date: 1990-11-09
Filing date: 1990-11-09
Publication date: 1991-07-24

Description

[Brief explanation of drawings]

図面はこの考案を研磨装置に具体化した一実施
例を示し、第１図は研磨装置全体を示す正面図、
第２図は同じく要部拡大正面図、第３図は第２図
のＡ−Ａ線断面図、第４図は同じく第３図のＢ−
Ｂ線断面図、第５図ａ，ｂは駆動機構部の作動状
態を説明するための要部概略横断面図である。ウオームホイール……１９、第二の軸としての
取付軸……２０、駆動手段としてのサーボモータ
……２３、第一の軸……２５、第一のウオーム…
…２６、第三の軸……２８、リニアスプラインボ
ールベアリング……３１、第二のウオーム……３
２、付勢手段としてのスプリング……３５。 The drawings show an embodiment of this invention in a polishing device, and FIG. 1 is a front view showing the entire polishing device;
Fig. 2 is an enlarged front view of the main parts, Fig. 3 is a sectional view taken along line A-A in Fig. 2, and Fig. 4 is a cross-sectional view taken along line A-A in Fig. 3.
A sectional view taken along line B and FIGS. 5a and 5b are schematic cross-sectional views of main parts for explaining the operating state of the drive mechanism section. Worm wheel...19, Mounting shaft as second shaft...20, Servo motor as drive means...23, First shaft...25, First worm...
...26, Third axis...28, Linear spline ball bearing...31, Second worm...3
2. Spring as biasing means...35.

Claims

[Claims for Utility Model Registration] A first shaft 25, a first worm 26 attached to the first shaft 25, and a worm wheel 19 that meshes with the first worm 26 attached. a second shaft 20; a third shaft 28 disposed on an axis intersecting the axis of the first shaft 25 and operatively connected to the first shaft 25 to rotate; and the third shaft 28 so as to rotate coaxially with the worm wheel 19 .
a second worm 32 that meshes with the second worm 32; a linear spline ball bearing 31 that smoothly slides and guides the second worm 32 along the axis of the third shaft 28; the first and second worms 26, 32, and biasing means 35 for slidingly biasing the worms 26, 32 in the direction of their rotational axes.