JPH0372241U - - Google Patents
Info
- Publication number
- JPH0372241U JPH0372241U JP13130689U JP13130689U JPH0372241U JP H0372241 U JPH0372241 U JP H0372241U JP 13130689 U JP13130689 U JP 13130689U JP 13130689 U JP13130689 U JP 13130689U JP H0372241 U JPH0372241 U JP H0372241U
- Authority
- JP
- Japan
- Prior art keywords
- air
- duct
- dust
- suction device
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 6
Landscapes
- Ventilation (AREA)
Description
第１図は本考案の一実施例を示す縦断面図であ
る。
１……ダストカウンター、２……クリーンルー
ム内の空気流、３……塵埃、４……空気吸引機、
４ａ……吸込ダクト、５……空気吸引量制御機、
６……室、７……フイルター、８……空気案内用
ダクト、９……空調機。
FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention. 1...Dust counter, 2...Air flow in the clean room, 3...Dust, 4...Air suction machine,
4a... Suction duct, 5... Air suction amount controller,
6...Room, 7...Filter, 8...Air guide duct, 9...Air conditioner.
Claims (1)
内するダクトと、前記ダクト内を流れる空気に含
まれる微少塵埃を除去するフイルターと、清浄な
空気を四方壁にて密封された室内を吸込ダクトを
介して排気する空気吸引機と、前記室内の塵埃量
を計測するダストカウンターと、前記ダストカウ
ンターの出力に基づいて空気吸引機の吸引量をコ
ントロールする制御機とを有することを特徴とす
るクリーンルーム。 An air conditioner, a duct that guides the air supplied from the air conditioner, a filter that removes minute dust contained in the air flowing through the duct, and a duct that sucks clean air into a room sealed with four walls. A clean room characterized by having an air suction device that exhausts air through the air suction device, a dust counter that measures the amount of dust in the room, and a controller that controls the suction amount of the air suction device based on the output of the dust counter. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13130689U JPH0372241U (en) | 1989-11-10 | 1989-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13130689U JPH0372241U (en) | 1989-11-10 | 1989-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0372241U true JPH0372241U (en) | 1991-07-22 |
Family
ID=31678822
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13130689U Pending JPH0372241U (en) | 1989-11-10 | 1989-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0372241U (en) |
-
1989
- 1989-11-10 JP JP13130689U patent/JPH0372241U/ja active Pending
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