JPH0371689B2 - - Google Patents
Info
- Publication number
- JPH0371689B2 JPH0371689B2 JP58130529A JP13052983A JPH0371689B2 JP H0371689 B2 JPH0371689 B2 JP H0371689B2 JP 58130529 A JP58130529 A JP 58130529A JP 13052983 A JP13052983 A JP 13052983A JP H0371689 B2 JPH0371689 B2 JP H0371689B2
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- hub
- polygon mirror
- rotor plate
- drive device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004804 winding Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 8
- 239000010687 lubricating oil Substances 0.000 claims description 3
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 9
- 239000003921 oil Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/121—Mechanical drive devices for polygonal mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Facsimile Scanning Arrangements (AREA)
Description
【発明の詳細な説明】
この出願の発明はポリゴンミラ駆動装置に関す
るものである。殊にポリゴンミラの安定的且円滑
な回転を可能となした偏平小型のブラシレスモー
タを具えた駆動装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The invention of this application relates to a polygon mirror driving device. In particular, the present invention relates to a drive device equipped with a small flat brushless motor that enables stable and smooth rotation of a polygon mirror.
従来よりポリゴンミラ駆動用として採用されて
いるモータは通常のシンクロナスモータ、ヒステ
リシスモータ等であり、その装置の構成は添付第
1図に図示の通りである。 The motors conventionally employed for driving polygon mirrors are ordinary synchronous motors, hysteresis motors, etc., and the configuration of the device is as shown in the attached FIG. 1.
ポリゴンミラaは駆動用モータの回転軸cに固
定された塔載用ハブeに装着され、ハウジングb
内に所定の巻線fを施した固定子dを収容し、前
記回転軸cはハウジングbのブラケツトgに各々
嵌装された軸受h,h′に回転自在に保持され、そ
の外周に回転子iを装着する。jはポリゴンミラ
のカバーである。 The polygon mirror a is attached to the tower mounting hub e fixed to the rotating shaft c of the drive motor, and the polygon mirror a is attached to the housing b.
A stator d having a predetermined winding f is housed therein, and the rotating shaft c is rotatably held by bearings h and h' fitted into a bracket g of the housing b, and a rotor is mounted on the outer periphery of the stator d. Wear i. j is the cover of polygon Mira.
この種モータは完成した駆動用モータの回転軸
に、後からハブeを嵌装固定しこれをポリゴンミ
ラを組付けるので必然的に縦長な構成となる欠点
があり、且つ回転軸cに対するハブe及びポリゴ
ンミラの組付け誤差が存在するため、回転中心軸
に対する、ポリゴンミラ反射面の倒れ精度が出し
にくい。従つてポリゴンミラの反射面に反射した
レーザ光線の正確な所定速度における走査が行わ
れない等の欠陥があり、更にポリゴンミラ駆動装
置全体の構成が縦方向に長く形成されているため
に、回転駆動中にポリゴンミラを端部に取付けた
回転軸が傾いたりする恐れがあり、従つて、レー
ザ光線の正確な位置での鏡面への入射や反射がで
きない等の欠点が生じた。 This type of motor has the drawback that the hub e is fitted and fixed to the rotating shaft of the completed drive motor afterwards, and the polygon mirror is attached to this, resulting in a vertically long structure. Also, since there is an error in assembling the polygon mirror, it is difficult to achieve accurate tilting of the polygon mirror reflective surface with respect to the rotation center axis. Therefore, there are defects such as the laser beam reflected on the reflective surface of the polygon mirror not being scanned at an accurate predetermined speed, and furthermore, since the entire structure of the polygon mirror drive device is formed long in the vertical direction, rotation is difficult. There is a risk that the rotating shaft on which the polygon mirror is attached at the end may tilt during driving, resulting in drawbacks such as the inability of the laser beam to be incident on or reflected on the mirror surface at an accurate position.
そこで本発明はこれらの欠点を克服すべく工夫
したもので、ポリゴンミラ駆動装置を極めて小型
薄型となし、更にモータの取付機構に改良を加え
てムラのないポリゴンミラの回転を企図したもの
である。 Therefore, the present invention has been devised to overcome these drawbacks, by making the polygon mirror drive device extremely small and thin, and by improving the motor mounting mechanism, it is intended to rotate the polygon mirror evenly. .
以下添付図面を参照して本発明の一実施例を説
明する。 An embodiment of the present invention will be described below with reference to the accompanying drawings.
第2図において、ポリゴンミラ1は、下方に開
口した断面コ字状の筒体を形成し、突出腕2′を
有する円筒状ハブ2の外側壁に一端側面が又その
下面は突出腕2′に動かないように水平方行に且
後述するシヤフト10と直交するように固定され
ているが、その固着をより強化するためにねじ1
5でハブ2に固定すると共に更にねじ27を用い
てハブ2に固定した上部バランサ11にも固定す
る。 In FIG. 2, the polygon mirror 1 forms a cylindrical body with a U-shaped cross section that opens downward, and has one end side surface on the outer wall of a cylindrical hub 2 having a protruding arm 2', and a lower surface thereof on the outer wall of a cylindrical hub 2 having a protruding arm 2'. It is fixed horizontally so as not to move and perpendicularly to the shaft 10, which will be described later.
5 to the hub 2, and also to the upper balancer 11 fixed to the hub 2 using screws 27.
筒状ハブ2の内側に断面ほぼL字状の一対の円
筒状シヤフト支持軸3を嵌合立設し、その中央部
に縦方向にシヤフト10を収納する。シヤフト1
0の上部はハブ2の上面に貫挿固定され、前記シ
ヤフト10と支持軸3との間に一対のボールベア
リング18,19を嵌着する。従つてシヤフト1
0はシヤフト支持軸3と一対のボールベアリング
18,19に支承されて、ハブ2、ポリゴンミラ
1、上部ロータプレート4、下部ロータプレート
20及び後述する一対のロータマグネツト5,
5′若くはF.Gマグネツト22(以上の部材を以
下回転部材という)と共に上ケース9と下ケース
8で形成する空洞内を回転自在に構成する。符号
17はシヤフト10に設けた止め輪、16はcリ
ング、又23,24はシヤフト軸3とボールベア
リング18,19との間に嵌入したOリングであ
る。ハブ2の側面とその突出腕2′の下面とに、
折曲部を具えた上ロータプレート4を固着する。
このプレートと対称的下方位置で、ハブ2の外側
に固定した下バランサ12の上面に下ロータプレ
ート20を固定する。 A pair of cylindrical shaft support shafts 3 having a substantially L-shaped cross section are fitted and erected inside the cylindrical hub 2, and a shaft 10 is housed in the center thereof in the vertical direction. Shaft 1
The upper part of the hub 2 is inserted into and fixed to the upper surface of the hub 2, and a pair of ball bearings 18 and 19 are fitted between the shaft 10 and the support shaft 3. Therefore, shaft 1
0 is supported by a shaft support shaft 3 and a pair of ball bearings 18, 19, and includes a hub 2, a polygon mirror 1, an upper rotor plate 4, a lower rotor plate 20, and a pair of rotor magnets 5, which will be described later.
5' It is configured to be rotatable in the cavity formed by the upper case 9 and the lower case 8 together with the FG magnet 22 (hereinafter referred to as a rotating member). Reference numeral 17 is a retaining ring provided on the shaft 10, 16 is a C-ring, and 23 and 24 are O-rings fitted between the shaft shaft 3 and ball bearings 18 and 19. On the side surface of the hub 2 and the lower surface of its protruding arm 2',
The upper rotor plate 4 provided with the bent portion is fixed.
A lower rotor plate 20 is fixed to the upper surface of a lower balancer 12 fixed to the outside of the hub 2 at a lower position symmetrical to this plate.
上ロータプレート4の下面にロータマグネツト
5を又下ロータプレート20上面には下ロータマ
グネツト5′をそれぞれ固定する。前記下ロータ
マグネツト5′と空隙をおいて対面するように、
巻線コイル群6を、下ケース8の彎曲腕部8′に
固着支承された基板7の下面に配設する。又基板
7のF.Gマグネツト22と相対する位置にF.Gコ
イル(図示せず)を印刷配線する。基板7をねじ
26、スペーサ33により下ケース8に動かない
ように固定する。又上ケース9の一端部はねじ2
5により下ケース8に動かないように固定され
る。ホール素子29は巻線コイル群6の中に収納
される。符号22は上ロータプレート4の折曲端
部に装着されたF.Gマグネツト(フリケンシーヂ
エナレータマグネツト)である。 A rotor magnet 5 is fixed to the lower surface of the upper rotor plate 4, and a lower rotor magnet 5' is fixed to the upper surface of the lower rotor plate 20, respectively. so as to face the lower rotor magnet 5' with a gap in between,
A winding coil group 6 is arranged on the lower surface of a substrate 7 fixedly supported by a curved arm 8' of a lower case 8. Further, an FG coil (not shown) is printed and wired at a position facing the FG magnet 22 on the substrate 7. The board 7 is fixed to the lower case 8 with screws 26 and spacers 33 so as not to move. Also, one end of the upper case 9 has a screw 2.
5, it is fixed to the lower case 8 so as not to move. The Hall element 29 is housed in the winding coil group 6. Reference numeral 22 designates an FG magnet (frequency energizer magnet) attached to the bent end of the upper rotor plate 4.
符号31は絶縁板30に嵌挿されて基板7に接
続するリード線で、コネクタ32と連結する。2
8,28′はそれぞれ上バランサ11、下バラン
サ12に設けた固定用ねじである。 A lead wire 31 is inserted into the insulating plate 30 and connected to the board 7, and is connected to the connector 32. 2
8 and 28' are fixing screws provided on the upper balancer 11 and the lower balancer 12, respectively.
次に巻線コイル群6について添付図面第3図に
おいて説明する。巻線コイル群6は基板7の下面
に各々60゜毎に一個づゝ合計6個設けた空心コイ
ル6a,6b,6c,6d,6e,6fよりな
り、適宜の位置に3個のホール素子21a,21
b,21cを配設する。 Next, the winding coil group 6 will be explained with reference to FIG. 3 of the accompanying drawings. The winding coil group 6 consists of a total of six air-core coils 6a, 6b, 6c, 6d, 6e, and 6f provided on the lower surface of the substrate 7, one at each 60° angle, and three Hall elements 21a are installed at appropriate positions. ,21
b, 21c are arranged.
尚添付図面第4図は本発明に係る別の実施例で
ある。この実施例においてはポリゴンミラ取付機
構を更に偏平小型化を実現するために、下方ベー
ス34と基板7との間に空心巻線コイル6を配設
し、一個のロータマグネツト5と空隙を保つよう
に対面せしめたものである。その他の構成は既述
の実施例とほぼ同様であるから説明を省略する。 Note that FIG. 4 of the accompanying drawings shows another embodiment of the present invention. In this embodiment, in order to further reduce the size and flatness of the polygon mirror mounting mechanism, an air-core winding coil 6 is disposed between the lower base 34 and the substrate 7 to maintain a gap with one rotor magnet 5. This is how we faced each other. The other configurations are substantially the same as those of the previously described embodiments, so explanations will be omitted.
本実施例は所謂三相ブラツシレスモータで構成
している。巻線として6a〜6fの6ケのコイル
とホール素子21a〜21c3ケが回転子マグネツ
ト5及び5′の磁界中の適宜な箇所に設置されて
居り、回転子マグネツトの磁極位置と極性をホー
ル素子で検出し電子回路によつて6ケのコイルに
流れる電流の大きさと方向を制御して回転子に所
定の回転方向の回転力を発生させる。又F.Gマグ
ネツト22によつて対向した基板7に印刷配線さ
れたコイルに誘起された速度起電力の大きさ或い
は周波数を利用して速度の制御を行うものであ
り、所定の安定した回転を持続し、ポリゴンミラ
(回転多面鏡)を所定速度で回転し、ミラの鏡面
の光学的精度を高く維持できるものである。 This embodiment is composed of a so-called three-phase brushless motor. Six coils 6a to 6f and three Hall elements 21a to 21c are installed as windings at appropriate locations in the magnetic field of the rotor magnets 5 and 5', and the magnetic pole position and polarity of the rotor magnets are controlled by the Hall elements. The magnitude and direction of the current flowing through the six coils is controlled by an electronic circuit to generate rotational force in a predetermined direction of rotation in the rotor. In addition, the speed is controlled by using the magnitude or frequency of the speed electromotive force induced in a coil printed and wired on the opposite substrate 7 by the FG magnet 22, so that a predetermined stable rotation is maintained. , a polygon mirror (rotating polygon mirror) is rotated at a predetermined speed, and the optical precision of the mirror surface can be maintained at a high level.
尚速度検出方法としては、本実施例はF.Gマグ
ネツトの磁力変化を基板のコイルで検出する方法
で説明したが、回転部材に光学的反射率の変化を
させるための濃淡のしま模様、又はスリツトを設
け、LEDとホトトランジスタを利用した光学的
エンコーダを利用してもよいことは勿論である。 As for the speed detection method, in this example, the change in the magnetic force of the FG magnet is detected by the coil on the substrate. Of course, an optical encoder using an LED and a phototransistor may also be used.
本発明の駆動装置においては、モータ駆動のシ
ヤフト10がその中心に位置するように、前記シ
ヤフト10に固定した断面コ字状筒状ハブ2の外
周にこのハブ2と同時に回転可能な回転部材であ
るポリゴンミラ1、上、下ロータプレート4,2
0、上下バランサ11,12、上下ロータプレー
トに装着したマグネツト5,5′上ロータプレー
トに取付けたF.Gマグネツト22等をシヤフト1
0をセンターとして一体に設けてあり、シヤフト
10とこれらの回転部材はシヤフト10の両端に
設けたセンター穴10a,10bを基準として同
時仕上加工が可能であるから容易に高精度を保つ
ことができる。 In the drive device of the present invention, a rotating member rotatable at the same time as the hub 2 is provided on the outer periphery of the cylindrical hub 2 having a U-shaped cross section fixed to the shaft 10 so that the motor-driven shaft 10 is located at the center thereof. A polygon mirror 1, upper and lower rotor plates 4, 2
0, upper and lower balancers 11, 12, magnets 5, 5' attached to the upper and lower rotor plates, and FG magnet 22, etc. attached to the upper rotor plate, to the shaft 1.
0 as the center, and the shaft 10 and these rotating members can be finished simultaneously using the center holes 10a, 10b provided at both ends of the shaft 10 as a reference, so high precision can be easily maintained. .
又円筒状ハブ22の外周に円筒状の前記部材を
配設してなるので全体の形状が円筒体を形成し従
つて回転駆動中ダイナミツクバランスを維持し易
い。更に上ロータプレート4とマグネツト5、並
に下ロータプレート20とマグネツト5′はそれ
ぞれ材料としてプラスチツクマグネツトを使用し
一体成型により容易に製作できる等の利点もあ
る。更にF.Gマグネツト22とマグネツト5とは
一体で形成して動作させることができることは勿
論である。又上マグネツト5のみを使用し下マグ
ネツト5′を省略する構成も可能である。 Further, since the cylindrical member is disposed around the outer periphery of the cylindrical hub 22, the overall shape forms a cylindrical body, and therefore, dynamic balance can be easily maintained during rotational driving. Another advantage is that the upper rotor plate 4 and magnet 5, as well as the lower rotor plate 20 and magnet 5', are each made of plastic magnets and can be easily manufactured by integral molding. Furthermore, it goes without saying that the FG magnet 22 and the magnet 5 can be integrally formed and operated. It is also possible to use only the upper magnet 5 and omit the lower magnet 5'.
又、本発明に係る駆動モータを取付けたポリゴ
ンミラ駆動装置は偏平、小型に構成され、且レー
ザ光線が正確な鏡面位置で入射、反射できるよう
円滑に回転できるので、光線の所定速度における
走査が正確に行われるものである。 In addition, the polygon mirror drive device equipped with the drive motor according to the present invention is configured to be flat and compact, and can rotate smoothly so that the laser beam can be incident and reflected at an accurate mirror surface position, so that scanning of the light beam at a predetermined speed is possible. It must be done accurately.
更に回転部材がシヤフト10と共に回転中に遠
心力により外方に飛散する潤滑油の飛沫は、ハブ
2とシヤフト支持軸3の空隙をへて下方バランサ
12とシヤフト支持軸3の底部とで形成される空
洞中へ流動するので、オイルの飛沫によりポリゴ
ンミラ1が汚染される恐れはない。又断面L字状
筒体シヤフト支部底部適宜の箇所に潤滑油のにが
し孔(図示せず)を貫設してもよい。又本発明の
構成は、従来例のように軸を介してモータの回転
力がハブに伝達されて、ミラーを回転する構成と
は異り、モータの回転力が直接ハブに作用してミ
ラーがハブと共に回転するものであるから、高い
回転精度を維持するものである。 Furthermore, droplets of lubricating oil that are scattered outward due to centrifugal force while the rotating member rotates together with the shaft 10 pass through the gap between the hub 2 and the shaft support shaft 3 and are formed between the lower balancer 12 and the bottom of the shaft support shaft 3. Since the oil flows into the cavity, there is no risk that the polygon mirror 1 will be contaminated by oil droplets. Further, a lubricating oil leak hole (not shown) may be provided at an appropriate location at the bottom of the L-shaped cylindrical shaft branch. Furthermore, unlike the conventional configuration in which the rotational force of the motor is transmitted to the hub through the shaft to rotate the mirror, the configuration of the present invention is such that the rotational force of the motor directly acts on the hub and rotates the mirror. Since it rotates together with the hub, it maintains high rotational accuracy.
第1図は従来例のポリゴンミラ駆動装置。第2
図は本発明に係るポリゴンミラ駆動装置の断面
図。第3図は空心巻線群を上ロータプレートの下
方より見た拡大平面図。第4図は本発明の別の実
施例の断面図。
1……ポリゴンミラ、2……ハブ、3……シヤ
フト支持軸、4……上部ロータプレート、5……
ロータマグネツト(上)、5′……ロータマグネツ
ト(下)、6……巻線コイル群、7……基板(巻
線)ステータ、8……下ケース、9……上ケー
ス、10……シヤフト、20……下部ロータプレ
ート、21a,21b,21c……ホール素子、
22……F.Gマグネツト。
Figure 1 shows a conventional polygon mirror drive device. Second
The figure is a sectional view of a polygon mirror driving device according to the present invention. FIG. 3 is an enlarged plan view of the air-core winding group viewed from below the upper rotor plate. FIG. 4 is a sectional view of another embodiment of the invention. 1...Polygon mirror, 2...Hub, 3...Shaft support shaft, 4...Upper rotor plate, 5...
Rotor magnet (upper), 5'... Rotor magnet (lower), 6... Winding coil group, 7... Board (winding) stator, 8... Lower case, 9... Upper case, 10... ...Shaft, 20...Lower rotor plate, 21a, 21b, 21c...Hall element,
22...FG magnet.
Claims (1)
面コ字状の筒状ハブを嵌装し、端部が前記ハブの
上面に貫挿固着したシヤフトを前記シヤフト支持
軸内側に回転自在に軸架し、前記ハブの外周には
ポリゴンミラ、上ロータプレート、下ロータプレ
ートを互に前記ハブと直角に水平方向に固定し、
上ロータプレートに装着した上ロータマグネツト
と下ケースに水平に支持されたステータ基板と又
下部ロータプレートに装着された下ロータマグネ
ツトはステータ基板に装着した巻線群とそれぞれ
空隙を介して対面し、ハブ外周に設けた前記ポリ
ゴンミラ、上ロータプレート、下ロータプレー
ト、前記上、下ロータプレートに設けた上、下マ
グネツト、及びハブとがシヤフトと共に上ケース
と下ケースで形成してなる空洞内を回転自在に設
けたポリゴンミラ駆動装置。 2 上ロータプレートに設けた上マグネツト並に
下ロータプレートに設けた下マグネツト等をプラ
スチツクマグネツトで形成し、それぞれのプレー
トと一体に形成してなる特許請求の範囲第1項に
記載のポリゴンミラ駆動装置。 3 シヤフト支持軸とハブとの隙間を通過して前
記支持軸の底部内側と下部バランサとで形成する
空隙へ潤滑油飛沫が流入するようになした特許請
求の範囲第1項のポリゴンミラ駆動装置。 4 シヤフトと回転部材とを同時仕上加工してな
る特許請求の範囲第1項に記載のポリゴンミラ駆
動装置。 5 ベースと基板との間に空心巻線を配設し、ロ
ータプレートに装着したロータマグネツトと基板
とが空隙を保つように対面せしめた特許請求の範
囲第1項に記載のポリゴンミラ駆動装置。[Scope of Claims] 1. A cylindrical hub having a U-shaped cross section is fitted around the outer periphery of a cylindrical shaft support shaft having an L-shaped cross section, and the shaft whose end portion penetrates and is fixed to the upper surface of the hub is used to support the shaft. A shaft is rotatably mounted on the inside of the shaft, and a polygon mirror, an upper rotor plate, and a lower rotor plate are each fixed horizontally at right angles to the hub on the outer periphery of the hub,
The upper rotor magnet mounted on the upper rotor plate, the stator board supported horizontally on the lower case, and the lower rotor magnet mounted on the lower rotor plate face the winding group mounted on the stator board through gaps. and a cavity formed by the polygon mirror provided on the outer periphery of the hub, the upper rotor plate, the lower rotor plate, the upper and lower magnets provided on the upper and lower rotor plates, and the hub together with the shaft and the upper case and the lower case. A polygon mirror drive device with a rotatable interior. 2. The polygon mirror according to claim 1, in which the upper magnet provided on the upper rotor plate and the lower magnet provided on the lower rotor plate are made of plastic magnets, and are formed integrally with the respective plates. Drive device. 3. The polygon mirror drive device according to claim 1, wherein lubricating oil droplets pass through the gap between the shaft support shaft and the hub and flow into the gap formed by the inner bottom part of the support shaft and the lower balancer. . 4. The polygon mirror drive device according to claim 1, which is formed by simultaneously finishing the shaft and the rotating member. 5. The polygon mirror drive device according to claim 1, wherein an air-core winding is disposed between the base and the substrate, and the rotor magnet mounted on the rotor plate and the substrate face each other so as to maintain a gap. .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58130529A JPS6022114A (en) | 1983-07-18 | 1983-07-18 | Polygon mirror driving device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58130529A JPS6022114A (en) | 1983-07-18 | 1983-07-18 | Polygon mirror driving device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6022114A JPS6022114A (en) | 1985-02-04 |
JPH0371689B2 true JPH0371689B2 (en) | 1991-11-14 |
Family
ID=15036474
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58130529A Granted JPS6022114A (en) | 1983-07-18 | 1983-07-18 | Polygon mirror driving device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6022114A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0668579B2 (en) * | 1985-09-06 | 1994-08-31 | 株式会社日立製作所 | Optical scanning device |
JPS62266516A (en) * | 1986-05-14 | 1987-11-19 | Fujitsu Ltd | Rotary mechanism for optical scanning polygon mirror |
-
1983
- 1983-07-18 JP JP58130529A patent/JPS6022114A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6022114A (en) | 1985-02-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20060066282A1 (en) | Motor apparatus and optical scanning apparatus, each with feedback control of drive load | |
KR100229827B1 (en) | Scanner motor | |
CN110870181B (en) | Motor positioning device, motor and cloud platform | |
JP3306933B2 (en) | Air magnetic bearing type motor | |
JPH0371689B2 (en) | ||
JPH0425522B2 (en) | ||
JPH0371690B2 (en) | ||
JPH0731887B2 (en) | Magnetic disk drive such as floppy disk | |
JP2019012104A (en) | Housing and housing unit | |
JP2005341648A (en) | Alignment stage apparatus | |
JPH0731119A (en) | Electromagnetic limited rotation motor | |
JPS58108513A (en) | Optical scanning device | |
JPH10225079A (en) | Motor | |
JPH0223101Y2 (en) | ||
JPH0937512A (en) | Dynamic pressure bearing motor and its manufacture | |
JP3284136B2 (en) | Spindle motor | |
JP3439954B2 (en) | Outer rotor type stepping motor | |
JPH0145253Y2 (en) | ||
JPH06133519A (en) | Magnetic disc drive motor | |
JPH0429416Y2 (en) | ||
JP4345162B2 (en) | Confocal optical scanner unit | |
JP2023021692A (en) | Motor device and electrically-driven caster | |
JPH0429213A (en) | Light deflecting motor | |
JPH05107591A (en) | Automatic diaphragm device | |
JPH0515121A (en) | Method for adjusting balance of rotary body |