JPH0371643U - - Google Patents
Info
- Publication number
- JPH0371643U JPH0371643U JP13233189U JP13233189U JPH0371643U JP H0371643 U JPH0371643 U JP H0371643U JP 13233189 U JP13233189 U JP 13233189U JP 13233189 U JP13233189 U JP 13233189U JP H0371643 U JPH0371643 U JP H0371643U
- Authority
- JP
- Japan
- Prior art keywords
- drainboard
- holes
- semiconductor material
- tapered hole
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 1
Description
第１図は本考案によるキヤリヤ支持用のスノコ
の一部を部分的に断面で示した側面図、第２図は
その一部の拡大平面図、第３図は第２図の線Ａ−
Ａに沿つて取つた断面図、第４図は半導体材料の
洗浄槽の概略断面図、第５図は従来のスノコを示
す斜視図、そして第６図は従来のスノコの一部の
拡大断面図である。
図中、１……洗浄槽、３……キヤリヤ、１０…
…スノコ、１１……孔、１２，１３……テーパー
穴。
FIG. 1 is a partially sectional side view of a slat for supporting a carrier according to the present invention, FIG. 2 is an enlarged plan view of the part, and FIG. 3 is a line A-- in FIG. 2.
4 is a schematic sectional view of a cleaning tank for semiconductor materials; FIG. 5 is a perspective view of a conventional drainboard; and FIG. 6 is an enlarged sectional view of a part of the conventional drainboard. It is. In the figure, 1...Cleaning tank, 3...Carrier, 10...
...Drain board, 11...hole, 12,13...tapered hole.
Claims (1)
材料が収められたキヤリヤが載せられるスノコで
あつて、前記スノコは下方から上方に洗浄液を通
すため多数の孔が設けられた板からなるものにお
いて、前記スノコの各前記孔の上面には上方に末
広状に開くテーパー穴が形成され且つ各前記孔の
下面には下方に末広状に開くテーパー穴が形成さ
れていることを特徴とする半導体材料のキヤリヤ
支持用スノコ。 A drainboard installed at the bottom of a cleaning tank and on which a carrier containing a semiconductor material is placed, the drainboard consisting of a plate having a number of holes for passing the cleaning liquid from below to above. , a semiconductor material characterized in that the upper surface of each of the holes of the drainboard is formed with a tapered hole that widens upward, and the lower surface of each of the holes is formed with a tapered hole that widens downward. Drainboard for supporting the carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13233189U JPH0371643U (en) | 1989-11-14 | 1989-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13233189U JPH0371643U (en) | 1989-11-14 | 1989-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0371643U true JPH0371643U (en) | 1991-07-19 |
Family
ID=31679795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13233189U Pending JPH0371643U (en) | 1989-11-14 | 1989-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0371643U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010179540A (en) * | 2009-02-04 | 2010-08-19 | Keiko Kuribayashi | Pencil and adjoining tool set therefor |
| US11469119B2 (en) | 2019-02-21 | 2022-10-11 | Kioxia Corporation | Substrate treatment apparatus |
-
1989
- 1989-11-14 JP JP13233189U patent/JPH0371643U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010179540A (en) * | 2009-02-04 | 2010-08-19 | Keiko Kuribayashi | Pencil and adjoining tool set therefor |
| US11469119B2 (en) | 2019-02-21 | 2022-10-11 | Kioxia Corporation | Substrate treatment apparatus |
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