JPH0371626U - - Google Patents
Info
- Publication number
- JPH0371626U JPH0371626U JP13332089U JP13332089U JPH0371626U JP H0371626 U JPH0371626 U JP H0371626U JP 13332089 U JP13332089 U JP 13332089U JP 13332089 U JP13332089 U JP 13332089U JP H0371626 U JPH0371626 U JP H0371626U
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- circuit board
- holder
- recess
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 7
- 239000000696 magnetic material Substances 0.000 claims 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13332089U JPH0371626U (id) | 1989-11-16 | 1989-11-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13332089U JPH0371626U (id) | 1989-11-16 | 1989-11-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0371626U true JPH0371626U (id) | 1991-07-19 |
Family
ID=31680729
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13332089U Pending JPH0371626U (id) | 1989-11-16 | 1989-11-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0371626U (id) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007113847A (ja) * | 2005-10-20 | 2007-05-10 | Altopia:Kk | 床下または天井裏の撹拌送風機能付き排気装置 |
JP2009200241A (ja) * | 2008-02-21 | 2009-09-03 | Ulvac Japan Ltd | 基板保持装置、基板ホルダ、真空処理装置、基板の温度制御方法 |
-
1989
- 1989-11-16 JP JP13332089U patent/JPH0371626U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007113847A (ja) * | 2005-10-20 | 2007-05-10 | Altopia:Kk | 床下または天井裏の撹拌送風機能付き排気装置 |
JP2009200241A (ja) * | 2008-02-21 | 2009-09-03 | Ulvac Japan Ltd | 基板保持装置、基板ホルダ、真空処理装置、基板の温度制御方法 |
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